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    PHOTO-SENSITIVE MEMS STRUCTURE
    1.
    发明专利
    PHOTO-SENSITIVE MEMS STRUCTURE 未知

    公开(公告)号：CA2530252A1

    公开(公告)日：2006-07-13

    申请号：CA2530252

    申请日：2005-12-14

    Applicant: LUCENT TECHNOLOGIES INC

    Inventor： SLUSHER RICHART ELLIOTT ,  AKSYUK VLADIMIR ANATOLYEVICH ,  SIMON MARIA ELINA

    IPC: B81B3/00 ,  B81B7/02 ,  B81C1/00

    Abstract: A heat-sensitive apparatus includes a substrate with a top surface, one or more bars being rotatably joined to the surface and having bimorph portions, and a plate rotatably joined to the surface and substantially rigidly joined to the one or more bars. Each bimorph portion bends in response to being heated. The one or more bars and the plate are configured to cause the plate to move farther away from the to p surface in response to the one or more bimorph portions being heated.

    A MEMS DEVICE WITH BI-DIRECTIONAL ELEMENT
    5.
    发明申请
    A MEMS DEVICE WITH BI-DIRECTIONAL ELEMENT 审中-公开
    具有双向元件的MEMS器件

    公开(公告)号：WO2009005683A8

    公开(公告)日：2010-01-28

    申请号：PCT/US2008007944

    申请日：2008-06-26

    Applicant: LUCENT TECHNOLOGIES INC ,  GASPARYAN ARMAN ,  GATES JOHN VANATTA ,  SIMON MARIA ELINA

    Inventor： GASPARYAN ARMAN ,  GATES JOHN VANATTA ,  SIMON MARIA ELINA

    IPC: H01H37/00

    CPC classification number: H01H1/0036 ,  B81B3/0024 ,  B81B2201/014 ,  B81B2201/031 ,  H01H37/00 ,  H01H2001/0047 ,  H01H2037/008 ,  H01H2061/006 ,  H01H2061/008

    Abstract: The present invention provides a bi-directional microelectromechanical element, a microelectromechanical switch including the bi-directional element, and a method to reduce mechanical creep in the bi-directional element. In one embodiment, the bi-directional microelectromechanical element includes a cold beam having a free end and a first end connected to a cold beam anchor. The cold beam anchor is attached to a substrate. A first beam pair is coupled to the cold beam by a free end tether and is configured to elongate when heated thereby to a greater temperature than a temperature of the cold beam. A second beam pair is located on an opposing side of the cold beam from the first beam pair and is coupled to the first beam pair and the cold beam by the free end tether. The second beam pair is configured to elongate when heated thereby to the greater temperature.

    Abstract translation: 本发明提供一种双向微电子机械元件，包括双向元件的微机电开关，以及减少双向元件中机械蠕变的方法。 在一个实施例中，双向微机电元件包括​​具有自由端的冷梁和连接到冷束锚的第一端。 冷梁锚附接到基板。 第一束对通过自由端系绳连接到冷束，并且被构造成在被加热时延伸到比冷束的温度更大的温度。 第二光束对位于与第一光束对的冷光束的相对侧上，并且通过自由端系绳耦合到第一光束对和冷光束。 第二束对被配置成在被加热时延长到更高的温度。

    MEMS ACTUATOR
    6.
    发明申请
    MEMS ACTUATOR 审中-公开
    MEMS致动器

    公开(公告)号：WO2009045346A4

    公开(公告)日：2009-12-30

    申请号：PCT/US2008011212

    申请日：2008-09-26

    Applicant: LUCENT TECHNOLOGIES INC ,  AKSYUK VLADIMIR ANATOLYEVICH ,  PARDO FLAVIO ,  SIMON MARIA ELINA

    Inventor： AKSYUK VLADIMIR ANATOLYEVICH ,  PARDO FLAVIO ,  SIMON MARIA ELINA

    IPC: H01H1/00

    CPC classification number: H01H1/0036 ,  B81B3/0024 ,  B81B2201/031 ,  H01H2001/0078 ,  H01H2061/006 ,  H01H2061/008

    Abstract: Apparatus including substrate, pusher assembly, and flexor assembly adjacent to pusher assembly. Pusher assembly includes hot and cold pusher arms. First ends of hot and cold pusher arms are anchored over substrate. Second ends of hot and cold pusher arms are coupled together and suspended for lateral displacement over substrate. Flexor assembly includes flexor arm, and conductor having actuator contact. First end of flexor arm is anchored over substrate. Pusher assembly is configured for causing lateral displacement of second end of flexor arm and of actuator contact over the substrate. Method includes providing apparatus and causing pusher assembly to laterally displace second end of flexor arm and actuator contact over substrate.

    Abstract translation: 装置包括与推动器组件相邻的衬底，推动器组件和屈肌组件。 推杆组件包括热推和冷推臂。 热推和冷推臂的第一端固定在基板上。 热推动臂和冷推动臂的第二端联接在一起并悬挂以在基底上横向移位。 屈肌组件包括屈肌臂和具有致动器接触的导体。 屈肌臂的第一端锚定在基底上。 推动器组件被构造成用于引起屈肌臂的第二端和致动器在衬底上的接触的横向位移。 方法包括提供装置并使推动器组件横向移动屈肌臂的第二端和促动器接触在衬底上。

    MEMS ACTUATOR
    9.
    发明申请
    MEMS ACTUATOR 审中-公开
    MEMS执行器

    公开(公告)号：WO2009045346A3

    公开(公告)日：2009-11-05

    申请号：PCT/US2008011212

    申请日：2008-09-26

    Applicant: LUCENT TECHNOLOGIES INC ,  AKSYUK VLADIMIR ANATOLYEVICH ,  PARDO FLAVIO ,  SIMON MARIA ELINA

    Inventor： AKSYUK VLADIMIR ANATOLYEVICH ,  PARDO FLAVIO ,  SIMON MARIA ELINA

    IPC: H01H1/00

    CPC classification number: H01H1/0036 ,  B81B3/0024 ,  B81B2201/031 ,  H01H2001/0078 ,  H01H2061/006 ,  H01H2061/008

    Abstract: Apparatus including substrate, pusher assembly, and flexor assembly adjacent to pusher assembly. Pusher assembly includes hot and cold pusher arms. First ends of hot and cold pusher arms are anchored over substrate. Second ends of hot and cold pusher arms are coupled together and suspended for lateral displacement over substrate. Flexor assembly includes flexor arm, and conductor having actuator contact. First end of flexor arm is anchored over substrate. Pusher assembly is configured for causing lateral displacement of second end of flexor arm and of actuator contact over the substrate. Method includes providing apparatus and causing pusher assembly to laterally displace second end of flexor arm and actuator contact over substrate.

    Abstract translation: 包括靠近推进器组件的基底，推动器组件和屈肌组件的装置。 推动器组件包括冷热推杆。 冷热推杆的第一端锚固在基板上。 冷热推杆的第二端连接在一起并悬挂在基板上横向移位。 弯曲组件包括屈肌臂和具有致动器接触的导体。 屈肌臂的第一端锚固在基底上。 推动器组件被构造成使得屈肌臂的第二端和致动器接触的横向位移在基底上。 方法包括提供装置并使得推动器组件横向移动屈肌臂的第二端和致动器接触在基底上。

    A MICROELECTROMECHANICAL MAGNETOMETER
    10.
    发明申请
    A MICROELECTROMECHANICAL MAGNETOMETER 审中-公开
    微电子电磁力计

    公开(公告)号：WO2007047267A3

    公开(公告)日：2007-09-20

    申请号：PCT/US2006039551

    申请日：2006-10-10

    Applicant: LUCENT TECHNOLOGIES INC ,  BOLLE CRISTIAN A ,  SIMON MARIA ELINA

    Inventor： BOLLE CRISTIAN A ,  SIMON MARIA ELINA

    IPC: G01R33/038

    CPC classification number: G01R33/038 ,  G01R33/0286

    Abstract: An apparatus comprising a substrate (125) and a MEM device (105) . The MEM includes a comb capacitor (110) and a magnetic element (117) physically connected to one electrode of the comb capacitor. The magnetic element is capable of moving the one electrode in a manner that alters a capacitance of the comb capacitor. The apparatus also includes at least one spring (130) physically connecting the magnetic element to the substrate.

    Abstract translation: 一种包括基板（125）和MEM装置（105）的装置。 MEM包括物理连接到梳状电容器的一个电极的梳状电容器（110）和磁性元件（117）。 磁性元件能够以改变梳状电容器的电容的方式移动一个电极。 该装置还包括将磁性元件物理连接到基底的至少一个弹簧（130）。

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