Ball lens fixing structure
    1.
    发明专利
    Ball lens fixing structure 审中-公开
    球镜固定结构

    公开(公告)号:JP2006146070A

    公开(公告)日:2006-06-08

    申请号:JP2004339261

    申请日:2004-11-24

    Abstract: PROBLEM TO BE SOLVED: To obtain a ball lens fixing structure that enables an optical fiber and a ball lens to be aligned more easily and more accurately.
    SOLUTION: Two substrates 2, 3 are joined in a manner that the grooves (2b, 3b) provided in each joining face 2a, 3a of the two substrates 2, 3 are faced with each other to form a cavity 4. In the cavity 4, a first spring structure is installed including a pair of springs 19 arranged vertically symmetrically relative to the center axis 8, as is a second spring structure including a pair of springs 9 arranged horizontally symmetrically relative to the center axis 8. A ball lens 6 is fixedly held between the first and the second spring structures.
    COPYRIGHT: (C)2006,JPO&NCIPI

    Abstract translation: 要解决的问题:获得能够更容易且更准确地对准光学和球形透镜的球透镜固定结构。 解决方案:两个基板2,3以这样的方式接合,使得设置在两个基板2,3的每个接合面2a,3a中的槽(2b,3b)彼此面对以形成空腔4.在 空腔4安装有第一弹簧结构,其包括相对于中心轴线8垂直对称布置的一对弹簧19,第二弹簧结构包括相对于中心轴线8水平对称布置的一对弹簧9。 透镜6固定地保持在第一和第二弹簧结构之间。 版权所有(C)2006,JPO&NCIPI

    Packaged electronic part and its manufacturing method
    2.
    发明专利
    Packaged electronic part and its manufacturing method 审中-公开
    包装电子部件及其制造方法

    公开(公告)号:JP2006041201A

    公开(公告)日:2006-02-09

    申请号:JP2004219433

    申请日:2004-07-27

    Abstract: PROBLEM TO BE SOLVED: To provide a packaged electronic part which is given a highly reliable sealing property by surely adhering a device with a protective member without specifying an adhesive agent.
    SOLUTION: The package electronic part is provided with a substrate 5, a device 1 formed or mounted on/to the substrate 5, and a transparent protective member 2 to cover and protect the device 1. A photo-curing material 3 is used to seal a space between the device 1 and the protective member 2 together with its periphery, and a light (ultraviolet ray) is given thereto from the upside of the protective member 2 to photo-cure the photo-curing material 3. Furthermore, a thermosetting material 4 is applied as to cover the photo-curing material 3 and to fit the protective member 2 to the substrate 5, and the whole body is thermally cured to make the packaged electronic part.
    COPYRIGHT: (C)2006,JPO&NCIPI

    Abstract translation: 要解决的问题:提供一种封装的电子部件,其通过在不指定粘合剂的情况下确保地将装置与保护部件粘合而获得高度可靠的密封性。 解决方案:封装电子部件设置有基板5,形成或安装在基板5上的装置1和透明保护构件2,以覆盖和保护装置1.光固化材料3是 用于密封装置1和保护构件2与其周边之间的空间,并且从保护构件2的上侧向其施加光(紫外线)以使光固化材料3光固化。此外, 施加热硬化材料4以覆盖光固化材料3并将保护构件2装配到基板5,并且将整体热固化以制造封装的电子部件。 版权所有(C)2006,JPO&NCIPI

    Matrix type optical switch and method of manufacturing the same
    3.
    发明专利
    Matrix type optical switch and method of manufacturing the same 审中-公开
    矩阵型光开关及其制造方法

    公开(公告)号:JP2005275100A

    公开(公告)日:2005-10-06

    申请号:JP2004089736

    申请日:2004-03-25

    Abstract: PROBLEM TO BE SOLVED: To provide a matrix type optical switch in which a loss of light propagating on an optical path is suppressed, and method of manufacturing the matrix type optical switch. SOLUTION: The matrix type optical switch includes N×M movable mirrors R 1, 1 -R N, M disposed at crossings of optical paths (grooves) 2 rrayed in a grid shape and graded-index optical fibers Fr 1, 1 -Fr N-1, M , Fc 1, 1 -Fc N, M-1 inserted between adjacent mirrors R 1, 1 -R N, M , wherein the optical paths 2 are switched by putting the movable mirrors R 1, 1 -R N, M into and out of the crossings of the optical paths 2, and refractive index of the graded-index optical fibers Fr 1, 1 -Fr N-1, M , Fc 1, 1 -Fc N, M-1 are decreased diametrically from their center axis. COPYRIGHT: (C)2006,JPO&NCIPI

    Abstract translation: 解决的问题:提供抑制光路传播的光的损失的矩阵型光开关,以及矩阵式光开关的制造方法。

    解决方案:矩阵型光开关包括设置在光路(凹槽)2的交叉处的N×M个可动镜R SB 1,1 SB,N,M SB 格子形状和渐变折射率光纤FR 1,1 -Fr SB,N-1,M ,Fc 1,1 / SB> N,M-1 插入在相邻反射镜R SB 1,1 SB,N,M / SB之间,其中光路2通过将可移动 从光路2的交叉点射出R< SB> 1,1< SB> N,M< / SB>和折射率光纤Fr 1,1-N,1,1,1,1,1,1,1,1,...,..., 从它们的中心轴。 版权所有(C)2006,JPO&NCIPI

    Method for manufacturing semiconductor structure
    4.
    发明专利
    Method for manufacturing semiconductor structure 审中-公开
    制造半导体结构的方法

    公开(公告)号:JP2005153062A

    公开(公告)日:2005-06-16

    申请号:JP2003393980

    申请日:2003-11-25

    Abstract: PROBLEM TO BE SOLVED: To provide a method for manufacturing a semiconductor structure having a movable part which is separated from a support substrate and composed of structurally integrated and electrically separated two or more parts.
    SOLUTION: The method for manufacturing a semiconductor structure has a recessed part forming process, in which a recessed part is formed by selectively removing a first substrate from a first main surface of the first substrate, a recessed part embedding process, in which an insulator is embedded to the recessed part, and a rear face etching process in which a protruding part of the first substrate having the embedded insulator is left behind by uniformly removing the first substrate from a second main surface arranged oppositely to the first main surface.
    COPYRIGHT: (C)2005,JPO&NCIPI

    Abstract translation: 要解决的问题:提供一种制造半导体结构的方法,该半导体结构具有与支撑基板分离并由结构上一体化且电气分离的两个或更多个部分组成的可移动部分。 解决方案:半导体结构的制造方法具有凹部形成工序,其中通过从第一基板的第一主表面选择性地去除第一基板而形成凹部,凹部嵌入工艺,其中 将绝缘体嵌入到凹部中,并且通过从与第一主表面相对布置的第二主表面均匀地除去第一基板而将具有嵌入绝缘体的第一基板的突出部分留下的背面蚀刻工艺。 版权所有(C)2005,JPO&NCIPI

    Optical switch
    5.
    发明专利
    Optical switch 审中-公开
    光开关

    公开(公告)号:JP2004354458A

    公开(公告)日:2004-12-16

    申请号:JP2003148985

    申请日:2003-05-27

    Abstract: PROBLEM TO BE SOLVED: To provide an optical switch which can decrease insertion loss and cross talk. SOLUTION: The optical switch operates in such a manner that at least a pair of opposing optical waveguides is intersected with each other and the optical paths of light beams are switched by inserting and retracting a reflector into and from the intersection of the optical waveguides. In the state where the reflector is inserted into the intersection, the reflector is in a size larger than an ellipse having the diameter twice or more of the diameter of the light beam on the reflector with respect to the center of the light beam as the reference. Or, in the state where the reflector is retracted from the intersection, the reflector does not overlap the ellipse having the diameter twice the diameter of the light beam with respect to the center of the light beam as the reference. COPYRIGHT: (C)2005,JPO&NCIPI

    Abstract translation: 要解决的问题:提供一种可以减少插入损耗和串扰的光开关。 解决方案:光开关的工作方式是使至少一对相对的光波导彼此相交,光束的光路通过将反射器插入和从光学器件 波导。 在反射器插入交叉点的状态下,反射器的尺寸大于椭圆,其直径相对于光束的中心为反射器的直径的两倍或更多的直径作为参考 。 或者,在反射器从交叉点缩回的状态下,反射器不重叠具有相对于光束中心的光束直径的两倍直径的椭圆作为基准。 版权所有(C)2005,JPO&NCIPI

    Electrostatic actuator
    6.
    发明专利
    Electrostatic actuator 审中-公开
    静电执行器

    公开(公告)号:JP2003279864A

    公开(公告)日:2003-10-02

    申请号:JP2002079882

    申请日:2002-03-22

    Abstract: PROBLEM TO BE SOLVED: To provide an electrostatic actuator for holding the displaced state of a needle even when a voltage applied between a movable electrode and a fixed electrode is eliminated and more saving a power consumption.
    SOLUTION: The electrostatic actuator comprises the movable electrode 2 provided on the needle 21 integrally formed through an elastic supporting body 22 at a fixed part 23 fixed on the surface of a supporting substrate 1, a fixed electrode 3 fixed on the supporting substrate 1 and made to face the movable electrode 2 at an interval so as to be capacitively coupled, a switch plate 4 erected on the needle 21 for passing through light when the needle 21 is at one position and interrupting the light when it is at the other position; and a holding means composed of a fixed engaging part 6 recess-projection connected with a movable engaging part 5 fixed to the supporting substrate 1 and projectingly provided from the needle 1. Corresponding to electrostatic force generated between the movable electrode 2 and the fixed electrode 3, the recess-projection engagement of the movable engaging part 5 and the fixed engaging part 6 is set and released and the needle 21 is displaced.
    COPYRIGHT: (C)2004,JPO

    Abstract translation: 要解决的问题:即使当消除施加在可动电极和固定电极之间的电压时,也提供用于保持针的位移状态的静电致动器,并且更节省功率消耗。 解决方案:静电致动器包括设置在针21上的可动电极2,固定在支撑基板1的表面上的固定部分23处通过弹性支撑体22整体形成,固定电极3固定在支撑基板上 1并以一定间隔与可动电极2面对以便电容耦合;当针21处于一个位置时,直立在针21上的通过光的开关板4,当它处于另一个位置时中断光 位置; 以及由与固定在支撑基板1上并从针1突出地设置的可动接合部5连接的固定接合部6的凹凸形成的保持机构。对应于在可动电极2和固定电极3之间产生的静电力 可移动接合部5和固定接合部6的凹凸接合被设置和释放,针21移位。 版权所有(C)2004,JPO

    METHOD FOR FORMING DIAPHRAGM OF SEMICONDUCTOR PRESSURE SENSOR

    公开(公告)号:JPH11311579A

    公开(公告)日:1999-11-09

    申请号:JP11913098

    申请日:1998-04-28

    Inventor: OGIWARA ATSUSHI

    Abstract: PROBLEM TO BE SOLVED: To provide a method for forming a diaphragm of a semiconductor pressure sensor whereby the semiconductor pressure sensor of predetermined sensitivity can be obtained at low cost. SOLUTION: According to this method for forming a diaphragm of a semiconductor pressure sensor, a semiconductor substrate 1 is etched, thereby forming a recessed part to be a diaphragm 11. In the method, fine particles 10 are sprayed at high speed from the side of a mask 9 via the mask opened only at a part where the recessed part is to be formed, thereby forming the recessed part. A side wall of the diaphragm 11 rises with an angle close to the right angle to the semiconductor substrate 1. The semiconductor pressure sensor of a fixed sensitivity can be manufactured at low cost. The method is superior in productivity with a large etching rate.

    DIELECTRIC ISOLATED SUBSTRATE AND MANUFACTURING METHOD THEREOF

    公开(公告)号:JPH10189714A

    公开(公告)日:1998-07-21

    申请号:JP34964496

    申请日:1996-12-27

    Inventor: OGIWARA ATSUSHI

    Abstract: PROBLEM TO BE SOLVED: To prevent the generation of a void at the tip of a V-shaped groove, by a method wherein the side face and the bottom face of a semiconductor substrate are covered by a dielectric film having the fluidity at a high temperature, and a single crystal semiconductor island, formed in the semiconductor substrate in such a manner that its surface is exposed, is provided. SOLUTION: A V-shaped groove 4a is formed on both sides of the front surface of a single crystal silicon substrate 4, a BPSG film 2 is formed as a dielectric film having fluidity at a high temperature, it is reflowed in a diffusion furnace, and the tip part of the V-shaped groove so rounded. A thick polysilicon layer, which becomes a semiconductor substrate 1, is deposited on the BPSG film 2. A single crystal silicon island 3 as the single crystal semiconductor island, on which the side face and the bottom face are covered by the BPSG film, is formed by polishing the single crystal silicon substrate 4 until the polysilicon which is embedded to the V-shaped groove 4a is exposed and the substrate 1 is polished. As a result, the polysilicon, which becomes the substrate 1 on the tip part of the V-shaped groove 4a, is filled up easily, and the generation of void can be prevented.

    OPTICAL COUPLING TYPE SEMICONDUCTOR RELAY

    公开(公告)号:JPH0993107A

    公开(公告)日:1997-04-04

    申请号:JP24264495

    申请日:1995-09-21

    Abstract: PROBLEM TO BE SOLVED: To prevent malfunction when an excess optical signal is generated from a light emitting diode. SOLUTION: This relay is provided with a light emitting diode 1, a photo diode array 2 receiving the optical signal from the light emitting diode 1, an output MOSFET 3 whose gate and source receive the optical electromotive force of the photo diode array 2, a 1st MOSFET 4 of a normally-on type relay whose gate connects to a cathode of the photo diode array 2, a high resistive element 9 connected between a source of the output MOSFET 3 and a cathode of the photo diode array 2, and a resistive element 10 connected between a source of the 1st MOSFET 4 and a cathode of the photo diode array 2.

    DRIVER CIRCUIT FOR ELECTROSTATIC THYRISTOR

    公开(公告)号:JPH0678523A

    公开(公告)日:1994-03-18

    申请号:JP22662692

    申请日:1992-08-26

    Inventor: OGIWARA ATSUSHI

    Abstract: PURPOSE:To prevent the breaking of an electrostatic induction thyristor due to the steep increase of current. CONSTITUTION:The anode currents of an electrostatic induction thyristor 9 are increased suddenly when an on signal is output from a gate driving-signal source 1, and a MOSFET 6 is turned on when the product L (dIA/dt) of the inductance L of an inductor 10 and the rate of time change (dIA/dt) of anode currents IA, is made larger than the threshold value Vth of the MOSFET 6. Consequently, currents fed from a DC power supply 2 to the electrostatic induction thyristor 9 are made to flow through the MOSFET 6. Turn-off currents are extracted from the gate of the electrostatic induction thyristor 9 by a capacitor 7 being charged for an on period at the same time, and the electrostatic induction thyristor 9 is brought to an off state, thus protecting the thyristor 9.

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