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公开(公告)号：CA2251957C
公开(公告)日：2003-07-01
申请号：CA2251957
申请日：1997-10-22
Applicant: MATSUSHITA ELECTRIC WORKS LTD
Inventor： KAMAKURA MASANAO , TOMONARI SHIGEAKI , YOSHIDA HITOSHI , NAKAMURA TAKURO , OKA NAOMASA , ISHIDA TAKURO , KASANO FUMIHIRO
IPC: G01P15/08 , G01P15/12 , G01P15/125 , G01P15/18
Abstract: The present invention is directed to a flexure transducer element which is used in an acceleration sensor for sensing an acceleration applied thereto. The flexure transducer element comprises (1) a frame, (2) a sheet member which has a plurality of flexible parts and a center part, (3) a weight which has a neck part integrally connected to the center part of the sheet member and which is hung from the sheet member through the neck part, and (4) a support member which supports the lower surface of the frame. The flexure transducer element is used for the semiconductor acceleration sensor in an automobile, aircraft or domestic electric appliance.
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公开(公告)号：DE602004005065T2
公开(公告)日：2007-06-06
申请号：DE602004005065
申请日：2004-08-25
Applicant: MATSUSHITA ELECTRIC WORKS LTD
Inventor： HARADA HIROSHI , OKA NAOMASA , SUZUKI YUJI , FUKSHIMA HIROSHI , NOGE HIROSHI , OGIHARA JUN , KAWANO KIYOHIKO
Abstract: An electrostatically driven latchable actuator system has an actuator and a pair of side effectors on opposite ends of the actuator. The actuator is resiliently supported to a substrate and is movable along a linear axis between two operative positions as being electrically attracted to one of the side effectors. A latch mechanism is provided to mechanically latch the actuator at either of the operative positions. The side effectors are movably towards and away from the actuator along the linear axis between a normal position and a shifted position close to the actuator. Both of the side effectors are also resiliently supported to the substrate to be movable towards the actuator by being electrostatically attracted thereto and away from the actuator by resiliency. The moving side effector is interlocked to the latch mechanism through a mechanical link so as to unlatch the actuator in response to one of the side effectors being attracted to the actuator, and allow the actuator to move from one operative position to the other operative position to be again latched thereat.
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公开(公告)号：DE602004005065D1
公开(公告)日：2007-04-12
申请号：DE602004005065
申请日：2004-08-25
Applicant: MATSUSHITA ELECTRIC WORKS LTD
Inventor： HARADA HIROSHI , OKA NAOMASA , SUZUKI YUJI , FUKSHIMA HIROSHI , NOGE HIROSHI , OGIHARA JUN , KAWANO KIYOHIKO
Abstract: An electrostatically driven latchable actuator system has an actuator and a pair of side effectors on opposite ends of the actuator. The actuator is resiliently supported to a substrate and is movable along a linear axis between two operative positions as being electrically attracted to one of the side effectors. A latch mechanism is provided to mechanically latch the actuator at either of the operative positions. The side effectors are movably towards and away from the actuator along the linear axis between a normal position and a shifted position close to the actuator. Both of the side effectors are also resiliently supported to the substrate to be movable towards the actuator by being electrostatically attracted thereto and away from the actuator by resiliency. The moving side effector is interlocked to the latch mechanism through a mechanical link so as to unlatch the actuator in response to one of the side effectors being attracted to the actuator, and allow the actuator to move from one operative position to the other operative position to be again latched thereat.
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公开(公告)号：CA2536431A1
公开(公告)日：2005-03-31
申请号：CA2536431
申请日：2004-09-21
Applicant: MATSUSHITA ELECTRIC WORKS LTD
Inventor： OGIHARA JUN , FUKSHIMA HIROSHI , HARADA HIROSHI , SUZUKI YUJI , NOGE HIROSHI , YOSHIHARA TAKAAKI , OKA NAOMASA , KAWANO KIYOHIKO , SUZUMURA MASAHIKO
Abstract: A process for fabricating a micro-electro-mechanical system (MEMS) composed of fixed components fixedly supported on a lower substrate and movable componen ts movably supported on the lower substrate. The process utilizes an upper substrate separate from the lower substrate. The upper substrate is selectively etched in its top layer to form therein a plurality of posts whi ch project commonly from a bottom layer of the upper substrate. The posts inclu de the fixed components to be fixed to the lower substrate and the movable components which are resiliently supported only to one or more of the fixed components to be movable relative to the fixed components. The lower substra te is formed in its top surface with at least one recess. The upper substrate i s then bonded to the top of the lower substrate upside down in such a manner a s to place the fixed components directly on the lower substrate and to place t he movable components upwardly of the recess. Finally, the bottom layer of the upper substrate is removed to release the movable components from the bottom layer for floating the movable components above the recess and allowing them to move relative to the lower substrate, while keeping the fixed components fixed to the top of the lower substrate.
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公开(公告)号：DE69729941D1
公开(公告)日：2004-08-26
申请号：DE69729941
申请日：1997-10-22
Applicant: MATSUSHITA ELECTRIC WORKS LTD
Inventor： YOSHIDA HITOSHI , TOMONARI SHIGEAKI , OKA NAOMASA , NAKAMURA TAKURO , ISHIDA TAKURO , KAMAKURA MASANAO , KASANO FUMIHIRO
IPC: G01P15/08 , G01P15/12 , G01P15/125 , G01P15/18 , H01L29/84
Abstract: A flexure transducer element which is used in an acceleration sensor for sensing an acceleration applied thereto comprises (1) a frame having an upper surface and a lower surface, (2) a sheet member which has a plurality of flexible parts and a center part, each flexible part extending between at least a portion of an inner edge of the frame and the center part and being integrally connected to them, (3) a weight which has a neck part integrally connected to the center part of the sheet member and which is hung from the sheet member through the neck part, and (4) a support member which supports the lower surface of the frame and of which inward side surface faces to a side surface of the weight through a first space therebetween, a second space which is continuous with the first space is defined between each flexible part of the sheet member and the weight, a third space is defined between the frame and the sheet member and/or through the sheet member, the frame and the sheet member are connected to each other and the sheet member and the weight are connected to each other in such a manner that, when the acceleration is applied to the element, at least two flexible parts are elastically deformed so that the weight is displaced relatively to the frame, the weight and the support member are formed of a semiconductor substrate, the second space is formed by removing a sacrificial layer which is provided in the semiconductor substrate, and the frame and the sheet member comprises an epitaxial layer provided on the semiconductor substrate.
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Patent Agency Ranking
公开(公告)号：CA2251957A1
公开(公告)日：1998-08-27
申请号：CA2251957
申请日：1997-10-22
Applicant: MATSUSHITA ELECTRIC WORKS LTD
Inventor： TOMONARI SHIGEAKI , OKA NAOMASA , NAKAMURA TAKURO , KAMAKURA MASANAO , KASANO FUMIHIRO , YOSHIDA HITOSHI , ISHIDA TAKURO
IPC: G01P15/08 , G01P15/12 , G01P15/125 , G01P15/18
Abstract: The present invention is directed to a flexure transducer element which is used in an acceleration sensor for sensing an acceleration applied thereto. The flexure transducer element comprises (1) a frame, (2) a sheet member which has a plurality of flexible parts and a center part, (3) a weight which has a neck part integrally connected to the center part of the sheet member and which is hung from the sheet member through the neck part, and (4) a support member which supports the lower surface of the frame. The flexure transducer element is used for the semiconductor acceleration sensor in an automobile, aircraft or domestic electric appliance.
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公开(公告)号：CA2536579C
公开(公告)日：2011-02-15
申请号：CA2536579
申请日：2004-08-25
Applicant: MATSUSHITA ELECTRIC WORKS LTD
Inventor： HARADA HIROSHI , OKA NAOMASA , SUZUKI YUJI , FUKSHIMA HIROSHI , NOGE HIROSHI , OGIHARA JUN , KAWANO KIYOHIKO
Abstract: An electrostatically driven latchable actuator system has an actuator and a pair of side effectors on opposite ends of the actuator. The actuator is resiliently supported to a substrate and is movable along a linear axis between two operative positions as being electrically attracted to one of the side effectors. A latch mechanism is provided to mechanically latch the actuator at either of the operative positions. The side effectors are movably towards and away from the actuator along the linear axis between a normal position and a shifted position close to the actuator. Both of the side effectors are also resiliently supported to the substrate to be movable towards the actuator by being electrostatically attracted thereto and away from the actuator by resiliency. The moving side effector is interlocked to the latch mechanism through a mechanical link so as to unlatch the actuator in response to one of the side effectors being attracted to the actuator, and allow the actuator to move from one operative position to the other operative position to be again latched thereat.
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公开(公告)号：CA2536431C
公开(公告)日：2010-01-26
申请号：CA2536431
申请日：2004-09-21
Applicant: MATSUSHITA ELECTRIC WORKS LTD
Inventor： OKA NAOMASA , HARADA HIROSHI , OGIHARA JUN , FUKSHIMA HIROSHI , NOGE HIROSHI , SUZUKI YUJI , KAWANO KIYOHIKO , YOSHIHARA TAKAAKI , SUZUMURA MASAHIKO
Abstract: A process for fabricating a micro-electro-mechanical system (MEMS) composed of fixed components fixedly supported on a lower substrate and movable components movably supported on the lower substrate. The process utilizes an upper substrate separate from the lower substrate. The upper substrate is selectively etched in its top layer to form therein a plurality of posts which project commonly from a bottom layer of the upper substrate. The posts include the fixed components to be fixed to the lower substrate and the movable components which are resiliently supported only to one or more of the fixed components to be movable relative to the fixed components. The lower substrate is formed in its top surface with at least one recess. The upper substrate is then bonded to the top of the lower substrate upside down in such a manner as to place the fixed components directly on the lower substrate and to place the movable components upwardly of the recess. Finally, the bottom layer of the upper substrate is removed to release the movable components from the bottom layer for floating the movable components above the recess and allowing them to move relative to the lower substrate, while keeping the fixed components fixed to the top of the lower substrate.
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公开(公告)号：DE69729941T2
公开(公告)日：2005-08-25
申请号：DE69729941
申请日：1997-10-22
Applicant: MATSUSHITA ELECTRIC WORKS LTD
Inventor： YOSHIDA HITOSHI , TOMONARI SHIGEAKI , OKA NAOMASA , NAKAMURA TAKURO , ISHIDA TAKURO , KAMAKURA MASANAO , KASANO FUMIHIRO
IPC: G01P15/08 , G01P15/12 , G01P15/125 , G01P15/18 , H01L29/84
Abstract: A flexure transducer element which is used in an acceleration sensor for sensing an acceleration applied thereto comprises (1) a frame having an upper surface and a lower surface, (2) a sheet member which has a plurality of flexible parts and a center part, each flexible part extending between at least a portion of an inner edge of the frame and the center part and being integrally connected to them, (3) a weight which has a neck part integrally connected to the center part of the sheet member and which is hung from the sheet member through the neck part, and (4) a support member which supports the lower surface of the frame and of which inward side surface faces to a side surface of the weight through a first space therebetween, a second space which is continuous with the first space is defined between each flexible part of the sheet member and the weight, a third space is defined between the frame and the sheet member and/or through the sheet member, the frame and the sheet member are connected to each other and the sheet member and the weight are connected to each other in such a manner that, when the acceleration is applied to the element, at least two flexible parts are elastically deformed so that the weight is displaced relatively to the frame, the weight and the support member are formed of a semiconductor substrate, the second space is formed by removing a sacrificial layer which is provided in the semiconductor substrate, and the frame and the sheet member comprises an epitaxial layer provided on the semiconductor substrate.
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公开(公告)号：CA2536579A1
公开(公告)日：2005-03-03
申请号：CA2536579
申请日：2004-08-25
Applicant: MATSUSHITA ELECTRIC WORKS LTD
Inventor： OKA NAOMASA , SUZUKI YUJI , HARADA HIROSHI , FUKSHIMA HIROSHI , OGIHARA JUN , NOGE HIROSHI , KAWANO KIYOHIKO
Abstract: An electrostatically driven latchable actuator system has an actuator and a pair of side effectors on opposite ends of the actuator. The actuator is resiliently supported to a substrate and is movable along a linear axis between two operative positions as being electrically attracted to one of th e side effectors. A latch mechanism is provided to mechanically latch the actuator at either of the operative positions. The side effectors are movabl y towards and away from the actuator along the linear axis between a normal position and a shifted position close to the actuator. Both of the side effectors are also resiliently supported to the substrate to be movable towards the actuator by being electrostatically attracted thereto and away from the actuator by resiliency. The moving side effector is interlocked to the latch mechanism through a mechanical link so as to unlatch the actuator in response to one of the side effectors being attracted to the actuator, and allow the actuator to move from one operative position to the other operativ e position to be again latched thereat.
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