公开(公告)号：AT134548T

公开(公告)日：1996-03-15

申请号：AT93902642

申请日：1992-12-14

Applicant: MAXWELL LAB INC

Inventor： HAMM RICHARD ROY ,  HOOGERWERF JOHN DAVID

IPC: B23K26/00 ,  B08B7/00 ,  B23K26/02 ,  B23K26/03 ,  B23K26/40 ,  B44D3/16 ,  G01J3/51 ,  G01N21/84 ,  G01N21/01

公开(公告)号：AT140411T

公开(公告)日：1996-08-15

申请号：AT93901187

申请日：1992-12-17

Applicant: MAXWELL LAB INC

Inventor： CATES MICHAEL CHRISTOPHER ,  HAMM RICHARD ROY ,  HOOGERWERF JOHN DAVID

IPC: B23K26/00 ,  B23K26/02 ,  B23K26/40 ,  B44D3/16

Abstract: A method for removing material from a structure, comprising the steps of: (1) generating a light beam; (2) irradiating the surface material of a structure with the light beam having an intensity sufficient to ablate the surface material and to cause the surface material to generate spectral emission signals having intensities; (3) scanning the structure with the light beam at a scan speed; (4) monitoring the spectral emissions to detect a selected one of the spectral emission signals having a selected wavelength and generating an electronic output signal representative of the intensity of a selected one of the spectral emission signals in response to detecting the selected one of the spectral emission signals; (5) determining an updated scan speed functionally related to the electronic output signal; and (6) directing the scan speed to be equal to the updated scan speed. A second embodiment determines the updated scan speed based on the intensity of spectral emission signals detected during predetermined intervals while the structure is illuminated by the light source. A third embodiment determines an updated scan speed based on the intensity of spectral emission signals resulting from a laser pulse irradiating the structure when the output of the light beam is approximately at a minimum.