公开(公告)号：US20030194172A1

公开(公告)日：2003-10-16

申请号：US10391336

申请日：2003-03-18

Applicant: MEMSCAP

Inventor： Diaa Khalil ,  Kareem Madkour ,  Bassam Saadany ,  Tarek Badreldin ,  Philippe Helin

IPC: G02B006/35

CPC classification number: G02B6/3582 ,  G02B6/3512 ,  G02B6/3546 ,  G02B6/356 ,  G02B6/3584 ,  G02B6/3596

Abstract: An optical switching matrix, made from a semiconductor-D dielectric-based substrate, comprising: at least one set of optical input fibers (12) and at least one set of optical output fibers (14) oriented substantially perpendicular to each other, a set of moveable mirrors (5, 13) placed at the intersections of the directions defined by the various optical fibers, each mirror (13) being capable of moving in order to reflect a beam coming from an optical input fiber, bound for an optical output fiber, a set of channels defined between the mirrors, inside which the various beams are propagated before and after having encountered the mirrors, in which: the set of mirrors is made on a first substrate wafer (2), said first wafer being covered with a second substrate wafer (20), the various channels (38) are formed between protruding zones (34) present under the second substrate wafer, said protruding zones comprising housings (33) inside which the moveable mirrors are able to move.

Abstract translation: 一种由半导体-D电介质基底制成的光学开关矩阵，包括：至少一组光输入光纤（ 12）和至少一组光输出光纤（ 14 每个反射镜（ 13）定位成基本垂直的方向，一组位于由各种光纤限定的方向的交点处的可移动反射镜（ 5，13 ） ）能够移动，以便反射来自光输入光纤的束，光束输入光纤被限定在光输出光纤之间，在镜之间定义的一组通道，其中各个光束在遇到之前和之后传播 镜子，其中：一组镜子在第一衬底晶片（ 2 ）上制成，所述第一晶片被第二衬底晶片（ 20 ）覆盖， 在各个突出区域（ 34 ）之间形成各种通道（ 38 ） 在第二衬底晶片下面，所述突出区域包括可移动反射镜能够移动的壳体（ 33）。

公开(公告)号：US20030027370A1

公开(公告)日：2003-02-06

申请号：US10205724

申请日：2002-07-26

Applicant: MEMSCAP(Societe Anonyme)

Inventor： Philippe Helin

IPC: H01L031/00 ,  H01L027/14 ,  H01L029/82 ,  H01L021/00

CPC classification number: G02B6/3584 ,  G02B6/266 ,  G02B6/3514 ,  G02B6/3546 ,  G02B6/357 ,  G02B26/0841 ,  G02B2006/12104

Abstract: Process for fabricating a microelectromechanical optical component (1) produced from a silicon substrate, comprising: optical propagation guides (2-5); a wall (6) which can move with respect to the propagation guides (2-5); and an electrostatic actuator (10) associated with return means formed by at least one beam (15, 16) which is capable of causing the moving wall (6) to move with respect to the rest of the substrate. According to the invention: the substrate used is made of single-crystal silicon, the (111) crystalographic planes of which are parallel to the plane of the substrate; the process comprises a first series of deep reactive ion etching steps during which the heights of the moving wall (6), of the electrodes of the actuator (11, 12), and of the beams (15, 16) of the return means of the actuator are defined with different values; and the process comprises a second wet etching step, making it possible to free the moving wall (6), the electrodes (11, 12) and the beams (15, 16) from the rest of the substrate

Abstract translation: 一种由硅衬底制造的微电子机械光学部件（1）的制造方法，包括：光学传播引导件（2-5）; 相对于传播引导件（2-5）移动的壁（6）; 以及与由至少一个梁（15,16）形成的返回装置相关联的静电致动器（10），其能够使所述移动壁（6）相对于所述基板的其余部分移动。 根据本发明：所使用的基板由单晶硅制成，（111）晶体平面平行于基板的平面; 该过程包括第一系列深反应离子蚀刻步骤，在该步骤期间，移动壁（6）的高度，致动器（11,12）的电极和返回装置的梁（15,16）的高度 致动器用不同的值定义; 并且该方法包括第二湿蚀刻步骤，使得可以将移动壁（6），电极（11,12）和光束（15,16）从基板的其余部分