公开(公告)号：CA2522790A1

公开(公告)日：2004-11-04

申请号：CA2522790

申请日：2004-04-20

Applicant: METCONNEX CANADA INC

Inventor： HNATIW ALAN ,  DUCELLIER THOMAS ,  PEALE DAVID ,  MALA MOHIUDDIN

IPC: B81B3/00 ,  G02B6/35 ,  G02B26/08 ,  H04J14/02

Abstract: The invention provides a micro-electro-mechanical-system (MEMS) mirror devic e, comprising: a mirror having a 2-dimensional rotational articulated hinge at a first end, and having a 1-dimensional rotational articulated hinge at a seco nd end opposite the first end; a movable cantilever connected to the mirror through the 1-dimensional rotational articulated hinge; a support structure connected to the mirror through the 2-dimensional rotational articulated hin ge and connected to the movable cantilever; whereby movement of said movable cantilever causes rotation of the mirror in a first axis of rotation, and th e mirror is also rotatable about a second torsional axis of rotation perpendicular to said first axis of rotation.

公开(公告)号：CA2526231A1

公开(公告)日：2005-11-03

申请号：CA2526231

申请日：2004-11-19

Applicant: METCONNEX CANADA INC

Inventor： HNATIW ALAN ,  PEALE DAVID ,  DUCELLIER THOMAS ,  MALA MOHIUDDIN

IPC: G02B26/08 ,  B81B3/00 ,  B81B7/02 ,  G02B6/35

Abstract: The invention provides a micro-electro-mechanical-system (MEMS) mirror devic e, comprising: a mirror having a 2-dimensional rotational articulated hinge at a first end, and having a 1-dimensional rotational articulated hinge at a seco nd end opposite the first end; a movable cantilever connected to the mirror through the 1-dimensional rotational articulated hinge; a support structure connected to the mirror through the 2-dimensional rotational articulated hin ge and connected to the movable cantilever; whereby movement of said movable cantilever causes rotation of the mirror in a first axis of rotation, and th e mirror is also rotatable about a second torsional axis of rotation perpendicular to said first axis of rotation.

公开(公告)号：CA2522790C

公开(公告)日：2013-12-03

申请号：CA2522790

申请日：2004-04-20

Applicant: METCONNEX CANADA INC

Inventor： MALA MOHIUDDIN ,  DUCELLIER THOMAS ,  HNATIW ALAN ,  PEALE DAVID

IPC: B81B3/00 ,  G02B6/35 ,  G02B26/08 ,  H04J14/02

Abstract: The invention provides a micro-electro-mechanical-system (MEMS) mirror device, comprising: a mirror having a 2-dimensional rotational articulated hinge at a first end, and having a 1-dimensional rotational articulated hinge at a second end opposite the first end; a movable cantilever connected to the mirror through the 1-dimensional rotational articulated hinge; a support structure connected to the mirror through the 2-dimensional rotational articulated hinge and connected to the movable cantilever; whereby movement of said movable cantilever causes rotation of the mirror in a first axis of rotation, and the mirror is also rotatable about a second torsional axis of rotation perpendicular to said first axis of rotation.