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1.发明公开SYSTEM AND METHOD FOR INTEGRATED SENSING AND CONTROL OF INDUSTRIAL PROCESSES 审中-公开系统和方法的综合感知和大型工业过程的控制
公开(公告)号：EP1664742A4
公开(公告)日：2010-05-05
申请号：EP04809542
申请日：2004-08-06
Applicant: MICROPTIX TECHNOLOGIES LLC
Inventor： COATES JOHN , RATHGEB FERNANDO , STOWELL RAND
IPC: G01N21/25 , G01N21/64 , H01L20060101
CPC classification number: G01N21/85
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