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1.发明公开A micro-opto-electro-mechanical system (MOEMS) comprising reflective Fresnel zone plates 审中-公开微光机电系统（MOEMS）具有反射菲涅耳带片
公开(公告)号：EP1316835A3
公开(公告)日：2003-08-06
申请号：EP02258177.1
申请日：2002-11-27
Applicant: MICROSCAN SYSTEMS INCORPORATED
Inventor： Scharf, Bruce R. , Daiber, Troy D.
CPC classification number: G02B26/0816 , G02B5/18 , G02B6/352 , G02B6/358 , G02B6/3584 , G02B26/0808
Abstract: The present application discloses a micro-opto-electromechanical apparatus comprising a silicon wafer comprising a plurality of layers, a reflector formed in one of the plurality of layers, and a pattern on the reflector to focus or collimate an incident beam of radiation into a reflected beam.
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2.发明公开A micro-opto-electro-mechanical system (MOEMS) comprising reflective Fresnel zone plates 审中-公开Mikrooptoelektromechanise系统（MOEMS）mit reflektierenden Fresnelschen Zonenplatten
公开(公告)号：EP1316835A2
公开(公告)日：2003-06-04
申请号：EP02258177.1
申请日：2002-11-27
Applicant: MICROSCAN SYSTEMS INCORPORATED
Inventor： Scharf, Bruce R. , Daiber, Troy D.
CPC classification number: G02B26/0816 , G02B5/18 , G02B6/352 , G02B6/358 , G02B6/3584 , G02B26/0808
Abstract: The present application discloses a micro-opto-electromechanical apparatus comprising a silicon wafer comprising a plurality of layers, a reflector formed in one of the plurality of layers, and a pattern on the reflector to focus or collimate an incident beam of radiation into a reflected beam.
Abstract translation: 本申请公开了一种微光学机电装置，其包括包括多个层的硅晶片，形成在多个层中的一个层中的反射器，以及反射器上的图案，以将入射入射的光束聚焦或准直成反射 光束。
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