公开(公告)号：AU3478793A

公开(公告)日：1993-08-03

申请号：AU3478793

申请日：1993-01-15

Applicant: MICROUNITY SYSTEMS ENGINEERING INC

Inventor： CHEN JANG FUNG ,  MATTHEWS JAMES A

IPC: G03F1/00 ,  G03F1/36 ,  G03F7/20 ,  G03F9/00 ,  H01L21/027

Abstract: An improvement for reducing proximity effects comprised of additional lines, referred to as intensity leveling bars, into the mask pattern. The leveling bars perform the function of adjusting the edge intensity gradients of isolated edges in the mask pattern, to match the edge intensity gradients of densely packed edges. Leveling bars are placed parallel to isolated edges such that intensity gradient leveling occurs on all isolated edges of the mask pattern. In addition, the leveling bars are designed to have a width significantly less than the resolution of the exposure tool. Therefore, leveling bars that are present in the mask pattern produce resist patterns that completely developed away when a nominal exposure energy is utilized during exposure of photoresist.

公开(公告)号：AU3786193A

公开(公告)日：1993-09-13

申请号：AU3786193

申请日：1993-02-23

Applicant: MICROUNITY SYSTEMS ENGINEERING INC

Inventor： ROSSEEL GEERT ,  HERNDON WILLIAM H ,  MATTHEWS JAMES A

IPC: H03K19/003 ,  H03K17/14 ,  H03K17/567 ,  H03K17/60 ,  H03K19/08 ,  H03K19/086 ,  H03K19/0944 ,  H03K17/16

Abstract: An improved BiCMOS logic circuit utilizes an emitter-coupled pair of bipolar transistors for differentially comparing an input signal with a logic reference level. Each of the bipolar transistors are resistively loaded by a network of p-channel metal-oxide-semiconductor (PMOS) transistors coupled in parallel. At least one of the parallel combination of transistors has its gate coupled to a control signal providing a variable load resistance. The control signal is preferably provided by a feedback network which maintains a constant voltage swing across the network over temperature.

公开(公告)号：AU8005091A

公开(公告)日：1992-01-07

申请号：AU8005091

申请日：1991-06-10

Applicant: MICROUNITY SYSTEMS ENGINEERING INC

Inventor： MATTHEWS JAMES A

IPC: G02F1/09 ,  G02F1/19 ,  G11B11/00 ,  G11B11/10 ,  G11B11/105 ,  G11C7/00 ,  G11C11/18 ,  G11C13/04 ,  H01L21/8246 ,  H01L21/8247 ,  H01L27/10 ,  H01L27/105 ,  H01L29/788 ,  H01L29/792 ,  H01L43/06 ,  H01S3/10 ,  G11C13/06

Abstract: An optical modulator utilizing a magnetic semiconductor device, whose operation is based on the Hall effect, includes a magnetic material formed on a semiconductor substrate. When an incoming beam of light having a dominant polarization direction is directed onto the magnetic material it becomes modulated. The result is an outgoing beam of light which has a rotated plane of polarization when compared to the dominant polarization direction. The direction of the rotated plane of polarization is indicative of the information stored in the magnetic material. The modulator of the present invention further includes a means for writing the information to the magnetic material and a semiconductor sensor means for electrically verifying the contents of the magnetic material.

公开(公告)号：AU1746795A

公开(公告)日：1995-08-29

申请号：AU1746795

申请日：1995-02-09

Applicant: MICROUNITY SYSTEMS ENGINEERING INC

Inventor： CHEN JANG FUNG ,  MATTHEWS JAMES A

IPC: G03F1/00 ,  G03F7/20

Abstract: A mask 206 for use in an apparatus utilized for optically transferring a lithographic pattern corresponding to an integrated circuit from said mask 206 onto a semiconductor substrate, said apparatus utilizing off-cases illumination, said pattern including at least one feature, said mask 206 comprising: an additional feature 215, 216 adjacent to and surrounding said at least one feature, said additional feature 215, 216 being disposed at a predetermined distance from all edges of said at least one feature and having the same transparency as said at least one feature, the width of said additional feature 215, 216 being selected such that the depth of focus of said at least one feature is increased.