公开(公告)号：MY156986A

公开(公告)日：2016-04-15

申请号：MYPI2011006032

申请日：2011-12-13

Applicant: MIMOS BERHAD

Inventor： SHIH TEH AUN ,  SHENG DANIEL BIEN CHIA ,  WAH LEE HING

IPC: H01L29/775

Abstract: THE PRESENT INVENTION GENERALLY RELATES TO A METHOD OF FORMING NANOTUBES OR NANOWIRES DEVICE IN AN OPENING, MORE PARTICULARLY THE PRESENT INVENTION RELATES TO METHOD OF FORMING DEVICE STRUCTURES USING RANDOM NANOTUBES OR NANOWIRES FORMATIONS. THE DEVICE WITH NANOSTRUCTRURES AS FORMED ACCORDING TO THE METHOD DESCRIBED IN THE PRESENT INVENTION COMPRISES FIRST, A SUBSTRATE (11). THEN, AT LEAST A CONDUCTIVE LAYER (21), AT LEAST A DIELECTRIC LAYER (22), AND AT LEAST A CATALYST LAYER (23) DEPOSITED ON THE SUBSTRATE (11) FOR STRUCTURING THE DEVICE, WHEREIN THE CATALYST LAYER (23) IS SANDWICHED WITHIN THE TWO LAYERS OF THE CONDUCTIVE LAYER (21), AND AN OPENING (24) IS ETCHED THROUGH SAID LAYERS FOR FORMING A PLURALITY OF NANOSTRUCTURES (25). MOST ILLUSTRATIVE DRAWING:

公开(公告)号：MY147415A

公开(公告)日：2012-12-14

申请号：MYPI2010005541

申请日：2010-11-24

Applicant: MIMOS BERHAD

Inventor： SHENG DANIEL BIEN CHIA ,  SHIH TEH AUN

IPC: B82B3/00

Abstract: THE PRESENT INVENTION PROVIDES A METHOD FOR NANOWIRES AND NANOTUBES (10, 20) GROWTH.THE NANOWIRES AND NANOTUBES (10,20) HAVE A PLURALITY OF FIRST NANOWIRES (10) AND A PLURALITY OF SECOND NANOWIRES (20) GROWN ON A SINGLE SUBSTRATE (30).THE FIRST AND SECOND NANOWIRES (10, 20) ARE GROWN USING TWO DIFFERENT TYPES OF CATALYST MATERIALS (11,21), WHEREIN THE FIRST NANOWIRES (10) ARE GROWN USING A FIRST CATALYST (11) WHEREAS THE SECOND NANOWIRES (20) ARE GROWN USING A SECOND CATALYST (21).