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公开(公告)号:WO2014185771A3
公开(公告)日:2015-04-30
申请号:PCT/MY2014000093
申请日:2014-05-02
Applicant: MIMOS BERHAD
Inventor: WAI YEE LEE , MOHSEN NABIPOOR , CHIA SHENG DANIEL BIEN , SURAYA SULAIMAN
IPC: G01N27/22
CPC classification number: G01N27/223
Abstract: The present invention relates to a capacitive humidity sensor (100) comprising: a semiconductor substrate (101), an insulating layer (103) resting on the semiconductor substrate (101), a sensing membrane (105), a plurality of interdigitated electrodes (107) and a plurality of electrode contacts (109). The present invention has ground plane connections (111) and the interdigitated electrodes (107) are sandwiched by the sensing membrane (105). The ground plane connections (111) and the sandwiching sensing membrane (105) are configured to eliminate stray capacitance and to provide optimal utilisation of fringing field effect respectively.
Abstract translation: 电容式湿度传感器技术领域本发明涉及一种电容式湿度传感器(100),包括:半导体衬底(101),保持在半导体衬底(101)上的绝缘层(103),感测膜(105),多个交叉指示电极 )和多个电极触点(109)。 本发明具有接地平面连接(111),并且叉指电极(107)被感测膜(105)夹在中间。 接地平面连接(111)和夹层感测膜(105)被配置为消除杂散电容并且分别提供边缘场效应的最佳利用。