公开(公告)号：JPH03231134A

公开(公告)日：1991-10-15

申请号：JP2693190

申请日：1990-02-06

Applicant: MITUTOYO CORP ,  NAT SPACE DEV AGENCY

Inventor： MURAKAMI MITSUO ,  TAKAZAWA HIDEYUKI ,  TAKAGI YOSHIHIKO ,  FURUTA EIJI ,  KAWASHIMA NORIO ,  ISHIKAWA MAMORU

IPC: G01M7/02

Abstract: PURPOSE:To adjust the height of a static pressure bearing and to change damping characteristic by using a second movable body that is another member for the pocket forming part of a movable body. CONSTITUTION:A movable body 6, an upper pad 7, a pre-loaded bolt 8, a lower pad 9 and a first pocket 10 are provided on a static pressure bearing 3 supporting a horizontal vibrating stage 1. A second movable body 20 that is another body is formed at a part of the movable body 6. A second pocket 92 is formed at the lower surface of the movable body 20. Pressure oil is supplied into the pockets 10a and 92 from a pressure-oil feeding source 11. Oil chambers 66a and 66b are formed between the upper and lower surfaces of a flange part 20a of the movable body 20 and between projections 64 and 64 of the movable body 6. When the pressure oil is supplied into the oil chambers 66a and 66b through a servo valve 21, the movable body 6 is moved in the up and down directions in response to the pressure difference. The space between the movable body 6 and the movable body 20 is adjusted, and the height of the upper surface 61 is adjusted. A controller 25 controls the servo valve 21 and controls the pressure oil which is supplied into the oil chambers 66a and 66b. Thus, the rigidity of the bearing 3 is lowered, and the damping performance can be improved.