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公开(公告)号：DE19523999A1
公开(公告)日：1996-02-08
申请号：DE19523999
申请日：1995-06-30
Applicant: MOTOROLA INC
Inventor： HASHEMI MAJID M , ABROKWAH JONATHAN K , ROGERS STEPHEN P
IPC: H01L21/302 , H01L21/205 , H01L21/306 , H01L21/3065 , H01L21/335 , C23F4/00
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