公开(公告)号：JPH10303260A

公开(公告)日：1998-11-13

申请号：JP12680898

申请日：1998-04-21

Applicant: MOTOROLA INC

Inventor： THEODORE ANDREW HOLY ,  LAUN L GOODE ,  LARRY J BASTOS

IPC: G01R31/26 ,  G01R1/06 ,  G01R1/073 ,  G01R3/00 ,  G01R31/28 ,  G01R31/316 ,  H01L21/66

Abstract: PROBLEM TO BE SOLVED: To provide an inspecting method for integrating the measurement and the inspection of a probe tip parameter in a production flow. SOLUTION: A measurement device of a parameter of a probe tip 20 is integrated on a chuck 24 of a probe inspection station 10, namely, on a substrate holder. The force of the probe tip on the single probe pin of a probe card 18, plural probe pins or all probe pins can simultaneously be measured. Data on a real time basis on a probe process is obtained by the integration of the measurement of the parameter at the probe tip such as probe tip force. Then, feedback between the excess driving of the measured probe tip parameter and the probe chuck in a vertical direction is realized. Inspection is integrated by periodically inspecting the parameter of the probe tip in the test of a die on a wafer 22.