公开(公告)号：US3745969A

公开(公告)日：1973-07-17

申请号：US3745969D

申请日：1971-04-19

Applicant: MOTOROLA INC

Inventor： HUFFMAN R ,  SMITH S

IPC: C23C16/458 ,  C23C13/12

CPC classification number: C23C16/4584

Abstract: There is disclosed offset top ejection apparatus for use in vapor deposition chambers which provides a uniform contaminationfree layer on top of a spinning susceptor plate. The uniformity of the layer is assured by providing an offset downwardly pointing nozzle which is off-centered from the revolving susceptor and from which the deposited material emanates. The arrangement of apertures and the taper of the conical nozzle defines the extent and uniformity of the resulting layer in the offset configuration. Off-setting an ejection nozzle permits a larger area to be uniformly coated resulting in a higher yield for semiconductor wafers carried by the rotating susceptor plate and on which are deposited a layer of dielectric, passivation or other material.

Abstract translation: 公开了一种用于气相沉积室的偏移顶部喷射装置，其在旋转基座板的顶部提供均匀的无污染层。 通过提供偏离向下指向的喷嘴来确保层的均匀性，该喷嘴从旋转基座偏心并且沉积材料从该喷嘴偏心。 孔的布置和锥形喷嘴的锥度限定了偏移构造中所得到的层的程度和均匀性。 脱模喷嘴允许更大的面积被均匀地涂覆，从而为由旋转的感受板承载的半导体晶片产生更高的产量，并在其上沉积介电层，钝化层或其它材料层。

公开(公告)号：WO1981000783A1

公开(公告)日：1981-03-19

申请号：PCT/US1980001085

申请日：1980-08-22

Applicant: MOTOROLA INC

Inventor： MOTOROLA INC ,  SMITH S

IPC: G11C11/40

CPC classification number: H03K19/09443 ,  G11C16/08 ,  G11C16/24

Abstract: In a shared contact electrically programmable read only memory, decoding circuitry is provided to prevent unwanted device programming due to sneak paths to ground. A two input NAND gate (15, 16) is coupled between adjacent column select lines. If either of the adjacent column select lines are energized, a data line will be enabled. Thus, for each column line energized, only two data lines will be enabled and only one of these will carry a voltage for enabling a memory device.