INSPECTION SYSTEM AND INSPECTION METHOD
    1.
    发明公开

    公开(公告)号:EP3620777A1

    公开(公告)日:2020-03-11

    申请号:EP18887118.0

    申请日:2018-03-17

    Inventor: MASUMURA Shigeki

    Abstract: Provided is an inspection lighting device with which, even when changes in light that occur at respective feature points on an object to be inspected are small, the amounts of those changes in light can be determined across the entire field-of-view range, and the feature points can be detected under exactly the same conditions. The inspection lighting device 100 includes a surface light source 1 and a lens 2 that is disposed between the surface light source 1 and an inspection object W, the lens 2 being disposed nearer to the inspection object W such that at least one of a shielding mask M1 and a filtering means F1 is located centered around a focus position of the lens. An irradiation solid angle of light emitted from the surface light source 1 and irradiated onto the inspection object W by the lens 2 is configured to have solid angle regions that have specific optical attributes and that are radially arranged around an optical axis of the irradiation solid angle. The shapes, sizes, and incline angles of irradiation solid angles of the inspection light as well as solid angle regions having specific optical attributes within the irradiation solid angles can be set to be substantially uniform across the entire field of view in accordance with changes that occur at feature points on the inspection object.

    ILLUMINATING DEVICE FOR INSPECTION, AND INSPECTION SYSTEM
    2.
    发明公开
    ILLUMINATING DEVICE FOR INSPECTION, AND INSPECTION SYSTEM 审中-公开
    照明设备检查和检查系统

    公开(公告)号:EP3249389A1

    公开(公告)日:2017-11-29

    申请号:EP15886429.8

    申请日:2015-08-04

    Inventor: MASUMURA Shigeki

    Abstract: [Object]
    To provide an inspection lighting device that allows identification of a light amount change within an observation solid angle of an imaging device under a constant condition even when a change in reflection, transmission, scattering occurring at a feature point on an inspection object is very small, thus allowing detection of a feature point providing only an extremely small change in the reflection, transmission, scattering.
    [Solution]
    In the inspection lighting device, between a surface light source 1 for emitting an inspection light and the inspection object W, at least one shielding mask M1 is disposed, and a lens 2 is disposed on a side closer to the inspection object W than the shielding mask M1 such that the shielding mask is positioned across the focus position of this lens as a center. In an irradiation solid angle of the inspection light for the inspection object W formed when the light emitted from the surface light source 1 is irradiated on to the inspection object W by the lens 2, the shielding mask M1 forms a dark area. So that, in accordance with a change in reflection, transmission, scattering occurring at a feature point on the inspection object, a shape, a size, a tilt of the irradiation solid angle of the inspection light can be changed.

    Abstract translation: 本发明的目的在于提供一种检查用照明装置,即使在检查对象物的特征点产生的反射,透射,散射的变化为一定的情况下,也能够在一定的条件下识别摄像装置的观察立体角内的光量变化 非常小,因此允许检测仅提供反射,透射,散射的极小改变的特征点。 [解决方案]在检查照明装置中,在用于射出检查光的面光源1与检查对象W之间配置至少一个遮蔽掩模M1,在靠近检查对象W的一侧配置透镜2 与屏蔽罩M1相比,屏蔽罩以该透镜的焦点位置为中心定位。 在从面光源1发出的光被透镜2照射到检查对象W时形成的检查对象W的检查光的照射立体角中,遮挡掩模M1形成暗区域。 因此,根据在检查对象上的特征点发生的反射,透射,散射的变化,可以改变检查光的照射立体角的形状,大小,倾斜。

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