公开(公告)号：US20160007435A1

公开(公告)日：2016-01-07

申请号：US14325193

申请日：2014-07-07

Applicant: Media Lario S.R.L.

Inventor： Raymond Merrill, JR. ,  Natale Ceglio ,  Daniel Stearns

IPC: H05G2/00

CPC classification number: H05G2/008 ,  G03F7/2039 ,  G03F7/70033 ,  G03F7/70166 ,  G03F7/70175 ,  G03F7/7055 ,  G03F7/70916 ,  H05G2/003 ,  H05G2/005

Abstract: Systems and methods for synchronous operation of debris-mitigation devices (DMDs) in an EUV radiation source that emits EUV radiation and debris particles are disclosed. The methods include establishing a select relative angular orientation between the first and second DMDs that provides a maximum amount of transmission of EUV radiation between respective first and second rotatable vanes of the first and second DMDs. The methods also include rotating the first and second sets of vanes to capture at least some of the debris particles while substantially maintaining the select relative angular orientation. The systems employ DMD drive units, and an optical-based encoder disc in one of the DMD drive units measures and controls the rotational speed of the rotatable DMD vanes. Systems and methods for optimally aligning the DMDs are also disclosed.

Abstract translation: 公开了在发射EUV辐射和碎屑颗粒的EUV辐射源中同步操作碎片减轻装置（DMD）的系统和方法。 所述方法包括在第一和第二DMD之间建立选择的相对角度取向，其提供在第一和第二DMD的相应的第一和第二可旋转叶片之间的EUV辐射的最大传输量。 所述方法还包括旋转第一组叶片和第二组叶片以捕获碎片颗粒中的至少一些，同时基本保持选择的相对角度取向。 该系统采用DMD驱动单元，并且其中一个DMD驱动单元中的基于光学的编码器盘测量并控制可旋转的DMD叶片的旋转速度。 还公开了用于最佳对准DMD的系统和方法。

公开(公告)号：US09609731B2

公开(公告)日：2017-03-28

申请号：US14325193

申请日：2014-07-07

Applicant: Media Lario S.R.L.

Inventor： Raymond Merrill, Jr. ,  Natale Ceglio ,  Daniel Stearns

IPC: H05G2/00 ,  G03F7/20

CPC classification number: H05G2/008 ,  G03F7/2039 ,  G03F7/70033 ,  G03F7/70166 ,  G03F7/70175 ,  G03F7/7055 ,  G03F7/70916 ,  H05G2/003 ,  H05G2/005

Abstract: Systems and methods for synchronous operation of debris-mitigation devices (DMDs) in an EUV radiation source that emits EUV radiation and debris particles are disclosed. The methods include establishing a select relative angular orientation between the first and second DMDs that provides a maximum amount of transmission of EUV radiation between respective first and second rotatable vanes of the first and second DMDs. The methods also include rotating the first and second sets of vanes to capture at least some of the debris particles while substantially maintaining the select relative angular orientation. The systems employ DMD drive units, and an optical-based encoder disc in one of the DMD drive units measures and controls the rotational speed of the rotatable DMD vanes. Systems and methods for optimally aligning the DMDs are also disclosed.