公开(公告)号：EP1130446A3

公开(公告)日：2004-06-23

申请号：EP01300503.8

申请日：2001-01-19

Applicant: Memscap S.A.

Inventor： Hill, Edward Arthur ,  Dhuler, Vijayakumar Rudrappa

IPC: G02B26/08 ,  G02B7/18

CPC classification number: B81B3/004 ,  B81B2201/032 ,  B81B2203/0109 ,  B81B2203/033 ,  B81B2203/058 ,  G02B7/1821 ,  G02B26/0816 ,  H01H1/0036 ,  H01H61/00 ,  H01H2001/0063 ,  H01H2061/006

Abstract: A micromechanical system can include a substrate, an actuator, and an actuated element. In particular, the actuator can include a serpentine arrangement of alternating actuating and opposing segments anchored at a first end thereof to the substrate wherein the actuating segments deflect in response to actuation thereof so that a second end of the serpentine arrangement moves relative to the substrate upon deflection of the actuating segments. The actuated element is attached to the second end of the serpentine arrangement so that the actuated element moves relative to the substrate upon deflection of the actuating segments. Related methods and actuators are also discussed.

公开(公告)号：EP1143283A3

公开(公告)日：2004-04-14

申请号：EP01302465.8

申请日：2001-03-16

Applicant: Memscap S.A.

Inventor： Dhuler, Vijayakumar Rudrappa ,  Hill, Edward Arthur

IPC: G02B26/02 ,  G02B26/08 ,  G02B6/35 ,  B81B3/00

CPC classification number: G02B6/3514 ,  G02B6/3546 ,  G02B6/357 ,  G02B6/358 ,  G02B26/0833 ,  G02B26/0841

Abstract: Microelectromechanical (MEM) Optical Cross-connect (OXC) switches having mechanical actuators are discussed. In particular, the MEM OXC switches can include a plurality of reflectors, wherein each of the plurality of the reflectors is movable to at least one of a respective first reflector position along a respective optical beam path from an associated input of the MEM OXC switch to an associated output thereof and a respective second reflector position outside the optical beam path. A mechanical actuator moves to at least one of a first mechanical actuator position and a second mechanical actuator position. A selector selects ones of the plurality of reflectors to be coupled to the mechanical actuator and at least one of the plurality of reflectors to be decoupled from the mechanical actuator, wherein the mechanical actuator is coupled to the selected ones of the plurality of reflectors in the first actuator position and wherein the mechanical actuator moves the selected ones of the plurality of reflectors from the respective first: reflector positions to the respective second reflector positions when the mechanical actuator moves from the first mechanical actuator position to the second mechanical actuator position. Related methods are also discussed.