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公开(公告)号:US11889764B2
公开(公告)日:2024-01-30
申请号:US17349249
申请日:2021-06-16
Applicant: Microjet Technology Co., Ltd.
Inventor: Hao-Jan Mou , Shih-Chang Chen , Jia-Yu Liao , Hung-Hsin Liao , Che-Wei Huang , Chi-Feng Huang , Yung-Lung Han , Chun-Yi Kuo , Wei-Ming Lee
IPC: H01L41/053 , H10N30/20 , H10N30/88
Abstract: A piezoelectric actuator includes a square suspension plate, an outer frame, a plurality of brackets and a square piezoelectric ceramic plate. The outer frame is arranged around the suspension plate. A second surface of the outer frame and a second surface of the suspension plate are coplanar with each other. Each of the plurality of brackets has two ends, a first end is perpendicular to and connected with the suspension plate, and a second end is perpendicular to and connected with the outer frame for elastically supporting the suspension plate. Each bracket has a length in a range between 1.22 mm and 1.45 mm and a width in a range between 0.2 mm and 0.6 mm. A length of the piezoelectric ceramic plate is not larger than a length of the suspension plate. The piezoelectric ceramic plate is attached on a first surface of the suspension plate.
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公开(公告)号:US11067073B2
公开(公告)日:2021-07-20
申请号:US15640731
申请日:2017-07-03
Applicant: Microjet Technology Co., Ltd.
Inventor: Shih-Chang Chen , Chi-Feng Huang , Yung-Lung Han , Shou-Hung Chen , Hung-Hsin Liao
Abstract: A fluid control device includes a piezoelectric actuator and a deformable substrate. The piezoelectric actuator includes a piezoelectric element and a vibration plate. The piezoelectric element is attached on a first surface of the vibration plate and is subjected to deformation in response to an applied voltage. The vibration plate is subjected to a curvy vibration in response to the deformation of the piezoelectric element. A bulge is formed on a second surface of the vibration plate. The deformable substrate includes a flexible plate and a communication plate stacked on each other. A synchronously-deformed structure is defined by the flexible plate and the communication plate. The deformable substrate is bent in the direction toward the vibration plate. There is a specified depth maintained between the flexible plate and the bulge of the vibration plate. The flexible plate includes a movable part corresponding to the bulge of the vibration plate.
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公开(公告)号:US20210048012A1
公开(公告)日:2021-02-18
申请号:US16919608
申请日:2020-07-02
Applicant: Microjet Technology Co., Ltd.
Inventor: Hao-Jan Mou , Shih-Chang Chen , Jia-Yu Liao , Hung-Hsin Liao , Chung-Wei Kao , Yung-Lung Han , Chi-Feng Huang , Chun-Yi Kuo
IPC: F04B43/04
Abstract: A micro pump includes a base plate, a valve membrane, an upper covering plate and a pump core module. The valve membrane is disposed in a valve membrane accommodation slot of the base plate, seals a fluid channel of the base plate and includes a valve aperture where a protruding portion of the base plate extended through. The upper covering plate is accommodated in an upper covering plate accommodation slot of the base plate and includes a fluid relief aperture sealed by the valve membrane, a fluid converging groove and a fluid converging channel between the fluid converging groove and a fluid-outlet channel of the base plate. The pump core module is accommodated within a pump accommodation slot of the base plate. By actuating the pump core module, the fluid passes through the fluid channel, the valve aperture, the fluid converging groove, and is discharged out through the fluid-outlet channel.
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公开(公告)号:US10774824B2
公开(公告)日:2020-09-15
申请号:US15861818
申请日:2018-01-04
Applicant: Microjet Technology Co., Ltd.
Inventor: Hung-Hsin Liao , Shih-Chang Chen , Jia-Yu Liao , Yung-Lung Han , Chi-Feng Huang , Wei-Ming Lee
IPC: F04B43/04 , F04B45/047 , F16K99/00 , F04B43/09
Abstract: A miniature fluid control device for transporting gas is disclosed, which includes a gas inlet plate, a resonance plate, a piezoelectric actuator and a gas collecting plate stacked on each other. The gas inlet plate includes at least one inlet, at least one convergence channel and a circular cavity which forms a convergence chamber. The resonance plate has a central aperture. The piezoelectric actuator includes a suspension plate, an outer frame and a piezoelectric plate, wherein the suspension plate has a cylindrical bulge aligned with the circular cavity. The ratio of a second diameter of the cylindrical bulge to a first diameter of the circular cavity is set in a specified range to optimize the gas pressure of the transported gas, thus assuring efficiency of gas transmission of the miniature fluid control device.
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公开(公告)号:US10385838B2
公开(公告)日:2019-08-20
申请号:US15409847
申请日:2017-01-19
Applicant: MICROJET TECHNOLOGY CO., LTD.
Inventor: Shih-Chang Chen , Chi-Feng Huang , Yung-Lung Han , Jia-Yu Liao , Shou-Hung Chen , Che-Wei Huang , Hung-Hsin Liao , Chao-Chih Chen , Jheng-Wei Chen , Ying-Lun Chang , Chia-Hao Chang , Wei-Ming Lee
IPC: F04B43/04 , F04B45/047 , F04B53/10 , H01L41/053 , H01L41/09
Abstract: A miniature fluid control device includes a gas inlet plate, a resonance plate and a piezoelectric actuator. The gas inlet plate includes at least one inlet, at least one convergence channel and a central cavity. A convergence chamber is defined by the central cavity. The resonance plate has a central aperture. The piezoelectric actuator includes a suspension plate, an outer frame and a piezoelectric ceramic plate. A gap is formed between the resonance plate and the piezoelectric actuator to define a first chamber. When the piezoelectric actuator is driven and after the gas is fed into the miniature fluid control device through the inlet of the gas inlet plate, the gas is sequentially converged to the central cavity through the convergence channel, transferred through the central aperture of the resonance plate, introduced into the first chamber, transferred downwardly through the piezoelectric actuator, and exited from the miniature fluid control device.
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公开(公告)号:US20210332810A1
公开(公告)日:2021-10-28
申请号:US17230058
申请日:2021-04-14
Applicant: Microjet Technology Co., Ltd.
Inventor: Hao-Jan Mou , Shih-Chang Chen , Jia-Yu Liao , Hung-Hsin Liao , Chung-Wei Kao , Chi-Feng Huang , Yung-Lung Han , Chang-Yen Tsai , Yang Ku
Abstract: An actuating and sensing module is disclosed and includes a bottom plate, terminals, a control chip, a partition plate, a gas pressure sensor, a thin gas transportation device and a cover plate. The bottom plate includes terminal grooves, a recess, a gas outlet and a gas relief aperture. The terminals are disposed in the terminal grooves. The control chip is disposed in the recess. The partition plate is stacked on the bottom plate and includes an outlet opening in communication with the gas outlet and a pressure relief orifice corresponding to the gas relief aperture. The thin gas transportation device seals the gas outlet and the pressure relief orifice. The cover plate includes an opening passed through by the thin gas transportation device. The gas is transported to the outlet opening by the thin gas transportation device and sensed by the gas pressure sensor disposed in the outlet opening.
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公开(公告)号:US10697448B2
公开(公告)日:2020-06-30
申请号:US15640707
申请日:2017-07-03
Applicant: Microjet Technology Co., Ltd.
Inventor: Yung-Lung Han , Chi-Feng Huang , Shih-Chang Chen , Jia-Yu Liao , Hung-Hsin Liao , Che-Wei Huang , Shou-Hung Chen
IPC: F04B43/04 , F04B45/047 , F04B53/16 , F04B53/10
Abstract: A miniature fluid control device includes a piezoelectric actuator, a gas collecting plate and a base. The piezoelectric actuator includes a suspension plate, an outer frame, at least one bracket and a piezoelectric ceramic plate. The suspension plate is a square plate. The outer frame is arranged around the suspension plate. A surface of the outer frame and a surface of the suspension plate are coplanar with each other. The gas collecting plate is a frame body with an accommodation space. The base includes a gas inlet plate and a resonance plate. The base is disposed within the accommodation space to seal the piezoelectric actuator. An adhesive layer is arranged between the second surface of the outer frame of the piezoelectric actuator and the resonance plate. Consequently, a depth of a compressible chamber between the piezoelectric actuator and the resonance plate is maintained.
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公开(公告)号:US10529911B2
公开(公告)日:2020-01-07
申请号:US15392080
申请日:2016-12-28
Applicant: MICROJET TECHNOLOGY CO., LTD.
Inventor: Shih-Chang Chen , Chi-Feng Huang , Yung-Lung Han , Jia-Yu Liao , Shou-Hung Chen , Che-Wei Huang , Hung-Hsin Liao , Chao-Chih Chen , Jheng-Wei Chen , Ying-Lun Chang , Chia-Hao Chang , Wei-Ming Lee
Abstract: A piezoelectric actuator includes a suspension plate, a piezoelectric ceramic plate, an outer frame and a bracket. The suspension plate is permitted to undergo a curvy vibration from a middle portion to a periphery portion. The piezoelectric ceramic plate is attached on the suspension plate. When a voltage is applied to the piezoelectric ceramic plate, the suspension plate is driven to undergo the curvy vibration. The outer frame is arranged around the suspension plate. The bracket is connected between the suspension plate and the outer frame for elastically supporting the suspension plate, and includes an intermediate part formed in a vacant space between the suspension plate and the outer frame and in parallel with the outer frame and the suspension plate, a first connecting part arranged between the intermediate part and the suspension plate, and a second connecting part arranged between the intermediate part and the outer frame.
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公开(公告)号:US10378529B2
公开(公告)日:2019-08-13
申请号:US15409815
申请日:2017-01-19
Applicant: MICROJET TECHNOLOGY CO., LTD.
Inventor: Shih-Chang Chen , Chi-Feng Huang , Yung-Lung Han , Jia-Yu Liao , Shou-Hung Chen , Che-Wei Huang , Hung-Hsin Liao , Chao-Chih Chen , Jheng-Wei Chen , Ying-Lun Chang , Chia-Hao Chang , Wei-Ming Lee
IPC: F04B43/04 , F04B45/047 , F04B53/10 , H01L41/09 , F16K99/00
Abstract: A miniature pneumatic device includes a miniature fluid control device and a miniature valve device. The miniature fluid control device includes a gas inlet plate, a resonance plate, a piezoelectric actuator and a gas collecting plate. A first chamber is formed between the resonance plate and the piezoelectric actuator. After a gas is fed into the gas inlet plate, the gas is transferred to the first chamber through the resonance plate and then transferred downwardly. Consequently, a pressure gradient is generated to continuously push the gas. The miniature valve device includes a valve plate and a gas outlet plate. After the gas is transferred from the miniature fluid control device to the miniature valve device, the valve opening of the valve plate is correspondingly opened or closed and the gas is transferred in one direction. Consequently, a pressure-collecting operation or a pressure-releasing operation is selectively performed.
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公开(公告)号:US20180331276A1
公开(公告)日:2018-11-15
申请号:US15973976
申请日:2018-05-08
Applicant: Microjet Technology Co., Ltd.
Inventor: Hung-Hsin Liao , Shih-Chang Chen , Jia-Yu Liao , Yung-Lung Han , Wei-Ming Lee
IPC: H01L41/09 , H01L41/053 , F15B5/00
CPC classification number: H01L41/098 , F15B5/006 , H01L41/053 , H01L41/332
Abstract: A piezoelectric actuator for a miniature fluid transportation device is provided and includes a piezoelectric actuating plate and a piezoelectric element. The piezoelectric actuating plate includes a suspension plate, an outer frame, and brackets. The suspension plate has a first thickness. The outer frame is arranged around the suspension plate and has a third thickness. Each of the brackets is connected between the suspension plate and the outer frame and has a fourth thickness. The third thickness is larger than the first thickness, and the first thickness is larger than the fourth thickness. The suspension plate, the outer frame and the brackets are constructed to form different stepped structures to minimize the thickness of the brackets, enhance the elasticity of the brackets. Thus, displacement of the suspension plate in the vertical direction is enhanced and the transportation efficiency of the miniature fluid transportation device is intensified.
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