Method of dividing a substrate into a plurality of individual chip parts
    1.
    发明公开
    Method of dividing a substrate into a plurality of individual chip parts 审中-公开
    Methode zur Abtrennung eines底物在mehreren einzelnen Anordnungen

    公开(公告)号:EP2390225A2

    公开(公告)日:2011-11-30

    申请号:EP11178879.0

    申请日:2002-12-19

    CPC classification number: B81C1/00888

    Abstract: The present invention relates to a method for dividing a substrate into a number of individual chip parts, comprising the steps of:
    forming a number of chip parts in the substrate, comprising, for each chip part, of arranging recesses in the substrate for containing fluid;
    arranging one or more breaking grooves in the substrate along individual chip parts;
    applying mechanical force to the substrate to break the substrate along the breaking grooves;

    wherein the steps of arranging recesses in the substrate and arranging breaking grooves in the substrate are performed substantially simultaneously,
    wherein the substrate comprises a first and a second substrate part, and the method comprises the steps of:
    a) arranging in the first substrate part at least one recess for containing fluid;
    b) arranging in the second substrate part passages to the recess in the first substrate part, wherein a first passage forms a fluid feed and a second passage forms a fluid discharge;
    c) arranging one or more breaking grooves in at least one of the substrate parts;
    d) placing the second substrate part on the first substrate part;
    e) breaking the substrate along the breaking grooves.

    Abstract translation: 本发明涉及一种将基板分割成多个单独芯片部件的方法,包括以下步骤:在基板中形成多个芯片部件,每个芯片部分包括在基板中设置用于容纳流体的凹槽 ; 沿着各个芯片部分在基板中布置一个或多个断开槽; 向基板施加机械力以沿着断裂槽破坏基板; 其特征在于,基板上同时进行在基板上排列凹部并配置断开槽的工序,其特征在于,所述基板包括第一基板部和第二基板部,所述方法包括以下工序:a)在所述第一基板部 至少一个用于容纳流体的凹槽; b)将第二基板部分通道布置在第一基板部分中的凹部中,其中第一通道形成流体进料,第二通道形成流体排放; c)在至少一个所述衬底部分中布置一个或多个断开槽; d)将第二基板部分放置在第一基板部分上; e)沿断裂槽破坏基板。

    Method of dividing a substrate into a plurality of individual chip parts
    2.
    发明公开
    Method of dividing a substrate into a plurality of individual chip parts 审中-公开
    用于在基板分离成多个单独的组件的方法

    公开(公告)号:EP2390225A3

    公开(公告)日:2014-03-12

    申请号:EP11178879.0

    申请日:2002-12-19

    CPC classification number: B81C1/00888

    Abstract: The present invention relates to a method for dividing a substrate into a number of individual chip parts, comprising the steps of:
    forming a number of chip parts in the substrate, comprising, for each chip part, of arranging recesses in the substrate for containing fluid;
    arranging one or more breaking grooves in the substrate along individual chip parts;
    applying mechanical force to the substrate to break the substrate along the breaking grooves;

    wherein the steps of arranging recesses in the substrate and arranging breaking grooves in the substrate are performed substantially simultaneously,
    wherein the substrate comprises a first and a second substrate part, and the method comprises the steps of:
    a) arranging in the first substrate part at least one recess for containing fluid;
    b) arranging in the second substrate part passages to the recess in the first substrate part, wherein a first passage forms a fluid feed and a second passage forms a fluid discharge;
    c) arranging one or more breaking grooves in at least one of the substrate parts;
    d) placing the second substrate part on the first substrate part;
    e) breaking the substrate along the breaking grooves.

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