METHOD OF VAPOR DEPOSITING THIN FILM OF ZINC OXIDE AT LOW PRESSURE AND LOW TEMPERATURE

    公开(公告)号:JP2003253445A

    公开(公告)日:2003-09-10

    申请号:JP2002057748

    申请日:2002-03-04

    Abstract: PROBLEM TO BE SOLVED: To lower the temperature at vapor deposition method of a zinc oxide thin film and to improve the orientation of the zinc oxide thin film. SOLUTION: The highly oriented zinc oxide thin film is synthesized at a low pressure and a low temperature by either of a first synthetic method and a second synthetic method. The first method for vapor depositing the zinc oxide thin film under a low pressure of ≤10 -2 Torr comprises primarily synthesizing zinc oxide at a substrate temperature of 500 to 700°C so that the zinc oxide covers the substrate surface partially, and thereafter, secondarily synthesizing the zinc oxide thin film at a substrate temperature of ≤400°C by using oriented zinc oxide as nuclei. The second method for synthesizing the zinc oxide thin film under a low pressure of ≤10 -2 Torr comprises primarily synthesizing oriented zinc oxide particles at a substrate temperature of ≤400°C by increasing the density of radicals with which the substrate is irradiated by shortening the distance between the oxygen radicals and the substrate and thereafter, secondarily synthesizing the zinc oxide thin film at a substrate temperature of ≤400°C by using oriented zinc oxide particles as nuclei in a state in which the distance between the source of oxygen radicals and the substrate is expanded, in which the density of the oxygen radicals at the primary synthesis is at least three times of that at the secondary synthesis. COPYRIGHT: (C)2003,JPO

    TREATMENT METHOD FOR ZINC OXIDE PHOTOCATALYST THIN FILM

    公开(公告)号:JP2003236376A

    公开(公告)日:2003-08-26

    申请号:JP2002044216

    申请日:2002-02-21

    Abstract: PROBLEM TO BE SOLVED: To provide a method for enhancing the photocatalytic activity of a zinc oxide photocatalyst thin film used for environmental purification and the like. SOLUTION: A highly-oriented zinc oxide thin film which is film-deposited on the surface of a base body and whose C-axis is perpendicular to a base plate is subjected to nitrogen radical treatment at 50 to 400°C temperature of the base body to enhance the photocatalytic activity of zinc oxide. For example, the highly-oriented zinc oxide thin film whose C-axis is perpendicular to the base plate is film-deposited on the surface of the base body by an MOCVD method and zinc oxide is irradiated with nitrogen radical using a radical source mounted on an MOCVD device. COPYRIGHT: (C)2003,JPO

    ZINC OXIDE PHOTOCATALYST
    3.
    发明专利

    公开(公告)号:JP2002166169A

    公开(公告)日:2002-06-11

    申请号:JP2000366503

    申请日:2000-12-01

    Abstract: PROBLEM TO BE SOLVED: To provide a zinc oxide photocatalyst which effectively restricts the photodissolution of zinc oxide, which still shows photocatalytic activity usable for decomposing and removing environmentally harmful substances or the like and which retains the transparency and UVA adsorbing property of zinc oxide itself. SOLUTION: The surface of zinc oxide is covered with titanium oxide (without reference to rutile-type, anatase-type or amorphous-type) of 1-100 nm in thickness.

    ZINC OXIDE-BASED MULTILAYER STRUCTURAL BODY AND ITS PRODUCING METHOD
    7.
    发明公开
    ZINC OXIDE-BASED MULTILAYER STRUCTURAL BODY AND ITS PRODUCING METHOD 审中-公开
    多层结构体及其制造方法的氧化锌

    公开(公告)号:EP1662576A4

    公开(公告)日:2007-11-28

    申请号:EP04771845

    申请日:2004-08-19

    CPC classification number: H01L29/7787 H01L29/225

    Abstract: [PROBLEMS] When zinc oxide semiconductor is used for an electric element, it is effective particularly to cause charge separation by comprising zinc oxide crystals of different states. [MEANS FOR SOLVING PROBLEMS] A zinc oxide-based multilayer structural body composed of a zinc oxide layer having a lattice volume Va and a donor concentration Na or a zinc oxide sold solution layer and a zinc oxide layer having a lattice volume Vb and a donor concentration Nb or a zinc oxide solid solution layer. The lattice volumes Va and Vb satisfy the relation Va Nb. The zinc oxide layer having the lattice volume Va serves as a charge supply layer, and the zinc oxide layer having the lattice volume Vb serves as a charge acceptive layer. The zinc oxide-based multilayer structural body is characterized in that even while no electric field is applied from outside to the multilayer structural body, a state that charges move from the layer serving as the charge supply layer into the layer serving as the charge acceptive layer is established, and a depletion layer is formed in the charge supply layer because of this charge movement.

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