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    DEVICE FOR MANUFACTURING ALIGNED CARBON NANOTUBE ASSEMBLY
    4.
    发明公开
    DEVICE FOR MANUFACTURING ALIGNED CARBON NANOTUBE ASSEMBLY 有权
    VORRICHTUNG ZUR HERSTELLUNG EINER AUSGERICHTETENKOHLENSTOFFNANORÖHRCHENANORDNUNG

    公开(公告)号：EP2450310A4

    公开(公告)日：2015-02-18

    申请号：EP10794138

    申请日：2010-06-29

    Applicant: ZEON CORP ,  NAT INST OF ADVANCED IND SCIEN

    Inventor： SHIBUYA AKIYOSHI ,  HATA KENJI ,  YUMURA MOTOO

    IPC: C01B31/02 ,  B01J15/00 ,  B01J19/00 ,  B01J19/22 ,  B82Y30/00 ,  B82Y40/00 ,  C01B31/00

    CPC classification number: C01B31/024 ,  B01J15/005 ,  B01J19/0006 ,  B01J19/0073 ,  B01J19/22 ,  B01J2219/00159 ,  B82Y30/00 ,  B82Y40/00 ,  C01B32/164 ,  C01B2202/08 ,  C23C16/0218 ,  C23C16/26 ,  C23C16/4408 ,  C23C16/4412 ,  C23C16/45502 ,  Y02P20/149

    Abstract: Provided is a production apparatus (100) for continuously producing aligned carbon nanotube aggregates on a substrate supporting a catalyst while continuously transferring the substrate. The production apparatus (100) includes gas mixing prevention means (12, 13) for preventing gas present outside a growth furnace (3a) from flowing into the growth furnace (3a). The gas mixing prevention means (12, 13) includes: a seal gas ejection section (12b, 13b) for ejecting a seal gas along opening planes of (i) an opening of the growth furnace (3a) through which opening a catalyst substrate (10) is transferred into the growth furnace (3a) and (ii) an opening of the growth furnace (3a) through which opening the catalyst substrate (10) is transferred out of the growth furnace (3a); and an exhaust section (12a, 13a) for sucking and exhausting the seal gas out of the production apparatus (100), so that the seal gas does not flow into the growth furnace (3a) through the openings of the growth furnace (3a). The production apparatus (100) prevents the outside air from flowing into the production apparatus (100), uniformly controls, within a range suitable to production of CNTs, a concentration distribution(s) and a flow rate distribution(s) of a raw material gas and/or a catalyst activation material on the substrate, and does not disturb gas flow as much as possible in the growth furnace (3a).

    Abstract translation: 提供一种用于在支撑催化剂的基板上连续生产排列的碳纳米管聚集体的生产设备（100），同时连续转移基板。 生产装置（100）包括用于防止存在于生长炉（3a）外部的气体流入生长炉（3a）的气体混合防止装置（12,13）。 气体混合防止装置（12,13）包括：密封气体喷射部分（12b，13b），用于沿着（i）生长炉（3a）的开口的开口面喷射密封气体，通过该密封气体喷射部分打开催化剂基板 10）转移到生长炉（3a）中，（ii）生长炉（3a）的开口，通过该开口将催化剂衬底（10）从生长炉（3a）中移出; 以及用于将密封气体从制造装置（100）排出的排气部（12a，13a），使得密封气体不会通过生长炉（3a）的开口流入生长炉（3a） 。 制造装置（100）防止外部空气流入制造装置（100），在适于生产CNT的范围内均匀地控制原料的浓度分布和流量分布 气体和/或催化剂活化材料，并且不会在生长炉（3a）中尽可能多地扰乱气流。

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