公开(公告)号：EP3101687A4

公开(公告)日：2017-11-22

申请号：EP15740967

申请日：2015-01-27

Applicant: NAT INST OF ADVANCED IND SCIENCE

Inventor： KURASHIMA YUUICHI ,  TAKAGI HIDEKI ,  MAEDA ATSUHIKO

IPC: H01L23/02 ,  B81C3/00 ,  H01L21/02

CPC classification number: B81C1/00269 ,  B81C2203/0118 ,  B81C2203/019 ,  B81C2203/035

Abstract: To provide: a package suitable for housing a precision mechanism such as a micro-electrical-mechanical system (MEMS) in a hollow-sealed interior space; and a method for forming the package. This invention includes a sacrificial thin film formation step for chemical-mechanical polishing a temporary substrate made of a readily polishable material and sputtering a metal thin film along the smoothly polished surface, and a first bonding step for forming a sealing frame obtained by bringing at least a noble metal on the metal thin film and bonding a substrate on the sealing frame. This invention also includes: a temporary substrate removal step for then removing the metal thin film along with the temporary substrate and exposing a new surface at the tip of the sealing frame; and a second bonding step for sputtering a noble metal thin film around a precision machine element on the machine substrate, bringing the new surface of the sealing frame into contact onto the noble metal thin film and bonding the new surface of the sealing frame onto the noble metal thin film at room temperature. A package obtained using this method can maintain an internal vacuum state of at least 10 -4 Pa for six months.