公开(公告)号：WO2005068353A1

公开(公告)日：2005-07-28

申请号：PCT/SG2005/000013

申请日：2005-01-19

Applicant: NATIONAL UNIVERSITY OF SINGAPORE ,  ZHOU, Guangya ,  VJ, Logeeswaran ,  TAY, Eng Hock Francis ,  CHAU, Fook Siong

Inventor： ZHOU, Guangya ,  VJ, Logeeswaran ,  TAY, Eng Hock Francis ,  CHAU, Fook Siong

IPC: B81B7/02

CPC classification number: H02N1/008 ,  B33Y30/00 ,  B81B3/0062 ,  B81B2201/033 ,  B81B2201/047 ,  B81B2203/0109 ,  B81B2203/056 ,  G02B26/0808 ,  G02B26/106

Abstract: An optical scanning apparatus includes an in-plane vibratory mass platform (110) having at least one diffraction grating (100) formed thereon as the scanning element, at least one flexure structure (120) that connects the mass platform to at least one fixed support (130), and at least one driving actuator (150) that drives the mass platform (110) into an in-plane vibratory motion (190) which can be rotational and/or translational (190). The apparatus may also be formed by a mass platform (110) having at least one diffraction grating (100) formed thereon as the scanning element, at least one driving actuator (150) connected to the mass platform (110) through at least one flexure structure (120). The driving actuator (150) drives the mass platform (110) into an in-plane vibratory motion (190).

Abstract translation: 一种光学扫描装置包括：具有在其上形成有至少一个衍射光栅（100）作为扫描元件的平面内振动质量平台（110），至少一个弯曲结构（120），其将质量平台连接到至少一个固定支撑 （130），以及至少一个驱动致动器（150），其驱动所述质量平台（110）进入能够旋转和/或平移的平面内振动运动（190）。 该装置还可以由其上形成有至少一个衍射光栅（100）作为扫描元件的质量平台（110）形成，至少一个驱动致动器（150）通过至少一个挠曲件连接到质量平台（110） 结构（120）。 驱动致动器（150）将质量平台（110）驱动成平面内的振动运动（190）。

公开(公告)号：EP1716071A1

公开(公告)日：2006-11-02

申请号：EP05704833.2

申请日：2005-01-19

Applicant: NATIONAL UNIVERSITY OF SINGAPORE

Inventor： ZHOU, Guangya ,  VJ, Logeeswaran ,  CHAU, Fook Siong, c/o Nat. Uni. of Singapore

IPC: B81B7/02 ,  G02B26/10

CPC classification number: H02N1/008 ,  B33Y30/00 ,  B81B3/0062 ,  B81B2201/033 ,  B81B2201/047 ,  B81B2203/0109 ,  B81B2203/056 ,  G02B26/0808 ,  G02B26/106

Abstract: An optical scanning apparatus includes an in-plane vibratory mass platform having at least one diffraction grating formed thereon as the scanning element, at least one flexure structure that connects the mass platform to at least one fixed support, and at least one driving actuator that drives the mass platform into an in-plane vibratory motion which can be rotational and/or translational. The apparatus may also be formed by a mass platform having at least one diffraction grating formed thereon as the scanning element, at least one driving actuator connected to the mass platform through at least one flexure structure. The driving actuator drives the mass platform into an in-plane vibratory motion.