公开(公告)号：JP2003090762A

公开(公告)日：2003-03-28

申请号：JP2001286535

申请日：2001-09-20

Applicant: NEW IND RES ORGANIZATION

Inventor： HASEGAWA TAKESHI

IPC: G01J3/42 ,  G01N21/35 ,  G01N21/3563

Abstract: PROBLEM TO BE SOLVED: To make measurable the in-plane and out-plane mode absorption spectra of a thin film at once from the same film, using not polarized usual electromagnetic waves. SOLUTION: A transparent board 1 is irradiated with not polarized usual electromagnetic waves at a plurality of different incident angles, to measure the transmission single beam spectra Sobsj at their respective incident angles. The in-plane and out-plane mode spectra Sa IP, Sa OP of the board 1 are calculated through operation from the measured spectra Sobsj . The transmission single-beam spectra Sobsj of a laminate of a thin film 10 laid on the transparent board 1 are also measured similarly to calculate its in-plane and out-plane mode spectra Sb IP, Sb OP, the ratio of Sb IP to Sa IP, Sb IP/Sa IP, is computed to obtain the in-plane mode absorption spectrum SIP of the film 10 and the ratio of Sb OP to Sa OP, Sb OP/Sa OP, is computed to obtain the out-plane mode absorption spectrum SOP of the film 10.