公开(公告)号：JP2002168997A

公开(公告)日：2002-06-14

申请号：JP2000364879

申请日：2000-11-30

Applicant: NEW IND RES ORGANIZATION

Inventor： MATSUI JUNJI ,  TSUSAKA YOSHIYUKI

IPC: G01N23/207 ,  G21K1/00 ,  G21K1/06

Abstract: PROBLEM TO BE SOLVED: To generate an X-ray micro-beam of a sufficiently small diameter and small diffusion angle using asymmetric reflection crystals. SOLUTION: Asymmetric reflection crystals 18a and 18b are disposed to be capable of contracting the diameter and diffusion angle of an incidental X-ray beam in a horizontal direction, and asymmetric reflection crystals 18c and 18d are disposed to be capable of contracting the diameter and diffusion angle of the X-ray beam in a vertical direction. The asymmetric reflection crystals 18a and 18b (18c and 18d) are supported to be capable of simultaneously rotating around a first support shaft 42, and the asymmetric reflection crystal 18b (18d) is supported to be capable of solely rotating around a second support shaft 43.