公开(公告)号：JP2014183011A

公开(公告)日：2014-09-29

申请号：JP2013058388

申请日：2013-03-21

Applicant: Ngk Insulators Ltd ,  日本碍子株式会社

Inventor： NOBORI KAZUHIRO ,  KIMURA TAKUJI ,  NAKAGAWA HIDEMI

IPC: H05B3/14 ,  C04B35/111 ,  H01L21/02 ,  H05B3/03

CPC classification number: C04B35/645 ,  B32B18/00 ,  C04B35/111 ,  C04B2235/3206 ,  C04B2235/3217 ,  C04B2235/445 ,  C04B2235/5445 ,  C04B2235/6023 ,  C04B2235/606 ,  C04B2235/6567 ,  C04B2235/6581 ,  C04B2235/72 ,  C04B2237/08 ,  C04B2237/343 ,  C04B2237/36 ,  C04B2237/595 ,  C04B2237/68 ,  H01L21/67103 ,  H01L21/6831 ,  H05B3/143

Abstract: PROBLEM TO BE SOLVED: To suppress in-plane variation of electrical resistivity while improving an inversion phenomenon of resistivity temperature dependency in a ceramic heater configured by burying a heater electrode in a ceramic base material.SOLUTION: An electrostatic chuck 10 includes a disk-shaped alumina ceramic base material 12 and a heater electrode 14 and an electrostatic electrode 16 which are buried in the alumina ceramic base material 12. An upper surface of the alumina ceramic base material 12 becomes a wafer placing surface 12a. The heater electrode 14 is patterned by knack of a single stroke so as to be wired over the whole surface of the alumina ceramic base material 12, and when voltage is applied, the heater electrode 14 generates heat and a wafer W is heated. The heater electrode 14 contains TiSias a main component.

Abstract translation: 要解决的问题：为了抑制电阻率的面内变化，同时改善通过将加热器电极埋在陶瓷基材中构成的陶瓷加热器中的电阻率温度依赖性的反转现象。解决方案：静电卡盘10包括盘形 氧化铝陶瓷基材12和埋在氧化铝陶瓷基材12中的加热电极14和静电电极16.氧化铝陶瓷基材12的上表面成为晶片放置面12a。 加热器电极14通过单次行程的诀窍进行图案化，以将其布线在氧化铝陶瓷基材12的整个表面上，并且当施加电压时，加热器电极14产生热量并且晶片W被加热。 加热器电极14包含TiSias主要成分。

公开(公告)号：EP2348003A4

公开(公告)日：2012-01-18

申请号：EP09810014

申请日：2009-08-21

Applicant: NGK INSULATORS LTD

Inventor： KIMURA KOJI ,  KIMURA TAKUJI ,  ONOGI TETSUYA ,  NAKAGAWA HIDEMI

IPC: C04B35/622 ,  C04B35/01 ,  C04B35/465 ,  C04B35/468 ,  C04B35/484 ,  C04B35/486 ,  C04B35/50 ,  C04B35/581 ,  C04B35/626 ,  C04B35/632 ,  C04B35/634 ,  C08G18/48 ,  C08G18/62

CPC classification number: C04B35/111 ,  C04B35/01 ,  C04B35/465 ,  C04B35/4682 ,  C04B35/484 ,  C04B35/486 ,  C04B35/50 ,  C04B35/581 ,  C04B35/6269 ,  C04B35/632 ,  C04B35/63456 ,  C04B2235/6025 ,  C08G18/48 ,  C08G18/6212 ,  C08G18/76 ,  Y10T428/24926 ,  Y10T428/249928 ,  Y10T428/252 ,  Y10T428/269 ,  Y10T428/31551

公开(公告)号：EP2679360A4

公开(公告)日：2015-06-03

申请号：EP12749534

申请日：2012-02-07

Applicant: NGK INSULATORS LTD

Inventor： HIRAIWA TOSHIKI ,  NAKAGAWA HIDEMI

IPC: B28B1/00 ,  B28B11/00 ,  C04B35/622

CPC classification number: C04B35/63456 ,  B28B1/00 ,  B28B3/00 ,  B28B5/00 ,  C04B35/00 ,  C04B35/01 ,  C04B35/624 ,  C04B35/6263 ,  C04B35/6264 ,  C04B35/6269 ,  C04B35/6303 ,  C04B35/632 ,  C04B35/634 ,  C04B35/636 ,  C04B35/6365 ,  C04B35/638 ,  C04B2235/3225 ,  C04B2235/3279 ,  C04B2235/349 ,  C04B2235/6022 ,  C04B2235/6023 ,  C04B2235/6025 ,  C04B2235/606 ,  C04B2235/61 ,  C08K3/00 ,  C08K3/22 ,  C08K5/00 ,  C08L2201/00 ,  C08L2312/00 ,  C08L75/04

Abstract: The powder molded product of the present invention is produced through molding of a slurry containing a powdery molding raw material, a dispersion medium for dispersing the molding raw material, a dispersant for uniformly dispersing the molding raw material in the dispersion medium, a binder precursor for producing an organic binder through a chemical reaction, a reaction promoter for promoting the chemical reaction, and a pseudo-plasticity-imparting agent for imparting pseudo-plasticity to the slurry. The production method of the present invention includes a slurry preparation step; a molding step of molding the prepared slurry into a primary powder molded product having a specific shape; and a drying-solidification step of solidifying the slurry by promoting the aforementioned chemical reaction in the primary powder molded product, and removing, through evaporation, the dispersion medium from the primary powder molded product.

公开(公告)号：EP2243758A4

公开(公告)日：2012-10-31

申请号：EP09712073

申请日：2009-02-13

Applicant: NGK INSULATORS LTD

Inventor： KIMURA KOJI ,  KIMURA TAKUJI ,  ONOGI TETSUYA ,  NAKAGAWA HIDEMI

IPC: C04B35/632 ,  B28B1/30 ,  C04B35/634 ,  C08G18/08 ,  C08G18/18 ,  C08G18/62 ,  C08G18/76

CPC classification number: C08G18/1825 ,  C04B26/16 ,  C04B35/111 ,  C04B35/4682 ,  C04B35/486 ,  C04B35/565 ,  C04B35/584 ,  C04B35/63456 ,  C04B2235/6025 ,  C08G18/6212 ,  C08G18/7671 ,  Y10T428/24926 ,  Y10T428/249924 ,  Y10T428/252 ,  Y10T428/269 ,  Y10T428/31786 ,  Y10T428/4935 ,  C04B14/303 ,  C04B14/305 ,  C04B14/306 ,  C04B14/324 ,  C04B14/328