公开(公告)号：JPH02251388A

公开(公告)日：1990-10-09

申请号：JP7042789

申请日：1989-03-24

Applicant: NGK INSULATORS LTD

Inventor： OTAKE YOSHIO ,  ASAI MICHIO

IPC: B23K26/00 ,  B23K26/02

Abstract: PURPOSE:To exactly measure the laser power and to exactly execute the positioning and the alignment adjustment of an optical axis by providing plural power monitors on a prescribed position of a work base. CONSTITUTION:At the time of measuring the laser power, the measurement is executed by condensing a laser light 2 to a power monitor 7-1 determined in advance among four pieces of power monitors 7-1-7-4 by an action of a mirror 3. In this case, an output of the monitor 7-1 is always monitored at the time when the laser light 2 is in the vicinity of the monitor 7-1, and a value at the time when its value becomes maximum is derived as the laser power. Also, as for a position of a work base 5, a position in which an output of each monitor 7-1-7-4 becomes maximum is derived as a position of each monitor 7-1-7-4, and by comparing a position of the work base 5 on a work base carrying means 8 and its position, its error is derived. By moving the work base 5 by the work base carrying means 8 by a portion of this error, positioning of the work base 5 is executed, and also, the alignment adjustment of an optical axis of the laser light and the work base 5 is also performed.

公开(公告)号：JPH02250302A

公开(公告)日：1990-10-08

申请号：JP7042689

申请日：1989-03-24

Applicant: NGK INSULATORS LTD

Inventor： OTAKE YOSHIO ,  ASAI MICHIO

IPC: H01C17/242 ,  H01C17/24 ,  H05K1/16

Abstract: PURPOSE:To obtain a thick-film resistor whose power-resistant characteristic and pulse-resistant characteristic are good by a method wherein a resistor and a conductor are trimmed simultaneously by using a laser along a direction of an electric current flowing in the resistor and the laser beam is scanned on an overlapped part of the resistor and the conductor twice or more. CONSTITUTION:A thick-film resistor 3 is formed between pillow electrodes 2-1, 2-2 protruding from conductor patterns 1-1, 1-2; a trimming operation is executed by using a laser beam along a direction of an electric current flowing from the pillow electrode 2-1 to 2-2 or from the pillow electrode 2-2 to 2-1. The laser beam is scanned on an overlapped part of the pillow electrodes 2-1 and 2-2 and the thick-film resistor 3 twice or more in order to eliminate a residue after the trimming operation in the overlapped part and to obtain a stable resistance value. Thereby, it is possible to eliminate a part in which an electric field is concentrated, such as a tip part of a pattern, a part where the pattern is bent perpendicularly or the like; it is possible to obtain the thick- film resistor whose power-resistant property and pulse-resistant property are good and which has a stable resistance value.

公开(公告)号：JPH0424904A

公开(公告)日：1992-01-28

申请号：JP12515690

申请日：1990-05-15

Applicant: NGK INSULATORS LTD

Inventor： OTAKE YOSHIO ,  YAMADA TOMOHIRO

IPC: H01C17/22

Abstract: PURPOSE:To increase and decrease the value of resistance by impressing impulse voltage between electrodes in a thick film resistor. CONSTITUTION:The common contact point A of a switch SW1 is connected to a contact point B and a capacitor C1 is charged by a d.c. voltage source E through a resistor R1. A change from the contact point A of SW1 to a contact point C takes place and impulse voltage is impressed to a thick film resistor RX. The thick film resistor RX that is impressed once by impluse voltage makes the value of resistance in the thick film resistor RX having the value of sheet resistance RS, i.e., about 100OMEGA or less, higher than the value obtained before being impressed by impulse voltage and lower than the value obtained within the range a resistance value exceeding about 100OMEGA. The stabilization of the value is realized by allowing voltage to be impressed to the thick film resistor RX where impulse voltage is impressed and further, by making the resistor RX perform self-heating.

公开(公告)号：JPS63235090A

公开(公告)日：1988-09-30

申请号：JP6811387

申请日：1987-03-24

Applicant: NGK INSULATORS LTD

Inventor： OTAKE YOSHIO ,  ASAI MICHIO

IPC: B23K26/082 ,  G02B26/10

Abstract: PURPOSE:To improve the accuracy and to enable high speed machining by driving a reflecting mirror by a driving device translating through a translation- swing movement conversion mechanism and arranging an encorder in the driving device. CONSTITUTION:A step motor 15 is rotated at the prescribed rotating angle and this rotation is transferred to a ball screw 23 through a coupling 21, and a rod 25 is translated by the ball screw 23 at minute unit corresponding to the rotating angle of the motor. The translation of the rod 25 is converted to an angle variation of an arm 27 by a link mechanism composing of a ball pin 29 and a long groove 30 together with an axial point 31, while securing translation of the rod 25. This angle variation rotates the reflecting mirror 13, and spot of the laser beam 73 from a laser beam generator 11 can be scanned toward X-axis or Y-axis direction.

公开(公告)号：JPH0316253A

公开(公告)日：1991-01-24

申请号：JP15072189

申请日：1989-06-14

Applicant: NGK INSULATORS LTD

Inventor： OTAKE YOSHIO ,  YAMADA TOMOHIRO

IPC: B23K26/361 ,  B23K26/00 ,  B23K26/351 ,  H01L27/01 ,  H01S3/00

Abstract: PURPOSE:To maintain the accuracy even if trimming is performed with a high speed by a method wherein a turning point or a stopping point is calculated and a thick film resistor is scanned by a laser beam to the turning point or the stopping point with a high speed. CONSTITUTION:A required resistance, a measured initial resistance and the positions of both ends are inputted to a calculating control means 15 by a resistance measuring and detecting means 13 and a position detecting means 14. The calculating control means 15 calculates the turning point of a laser beam direction by which a thick film resistor is scanned along the width direction or the stopping point of the laser beam beforehand in accordance with the inputted data and gives the calculated results to a laser processing means 11 to control the laser beam scanning. Therefore, not only the trimming accuracy can be improved but also the accuracy can be maintained even if the trimming speed is high and, moreover, the variation of a short time drifting rate can be eliminated even if there is a turning point, for instance in the case of L-cutting, and the accuracy can be improved further. With this constitution, the accuracy can be maintained even if the trimming speed is increased.