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公开(公告)号：JP2005268412A
公开(公告)日：2005-09-29
申请号：JP2004076451
申请日：2004-03-17
Applicant: Nikon Corp , 株式会社ニコン
Inventor： HORIKAWA HIROTO , KAYAMA YASUNAGA
IPC: G03F7/207 , H01L21/027
Abstract: PROBLEM TO BE SOLVED: To provide an aligner where replacing work of an optical element contacting with a liquid and judgment of its replacing time are automated in a liquid immersion exposure device, and to provide an exposure method and a method for manufacturing a device.
SOLUTION: The aligner EX forms a liquid immersion area AR between a projection optical system 30 and a substrate W, and projects the image of a pattern PA onto the substrate W through a liquid L forming the area AR and the projection optical system 30 to expose the substrate W. The aligner EX is provided with an optical element replacer 60 for replacing the optical element 32 arranged at the lower end of the projection optical system 30 and contacting with the liquid L with a new optical element 32.
COPYRIGHT: (C)2005,JPO&NCIPIAbstract translation: 要解决的问题：提供一种对准器，其中替换与液体接触的光学元件的工作，并且在液浸曝光装置中自动更换其更换时间，并提供一种曝光方法和制造方法 设备。 解决方案：对准器EX在投影光学系统30和基板W之间形成液浸区域AR，并且通过形成区域AR的液体L和投影光学系统将图案PA的图像投影到基板W上 对准器EX设置有光学元件替换器60，用于替换布置在投影光学系统30的下端处的光学元件32并且与液体L与新的光学元件32接触。
版权所有（C）2005，JPO＆NCIPI
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公开(公告)号：JPH09133764A
公开(公告)日：1997-05-20
申请号：JP28998295
申请日：1995-11-08
Applicant: NIKON CORP
Inventor： KAYAMA YASUNAGA
Abstract: PROBLEM TO BE SOLVED: To quickly deal with various environments so as to perform easy and quick measuring by transmitting a measuring wave and measuring a distance based on the propagation delay of the returned measuring wave. SOLUTION: A transmitting means 1 transmits a measuring wave in a specified direction. A receiving means 2 receives the measuring wave returned from the specified direction. A measuring condition storing means 3 arranged so as to be freely detached stores a preset measuring condition. A reading means 4 reads the measuring condition. According to the measuring condition, a range finding means 5 measures a distance from the propagation delay of the measuring wave returned from the specified direction to a signpost positioned in the specified direction. Thus, an operator engaged in measuring quickly changes the measuring condition (the number of measuring times, measuring time, measuring interval, receiving level, statistical processing and others) by removing the measuring condition storing means 3 and changinging this with another according to an environmental change during measuring.
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公开(公告)号：JPH09101150A
公开(公告)日：1997-04-15
申请号：JP26131895
申请日：1995-10-09
Applicant: NIKON CORP
Inventor： KAYAMA YASUNAGA
Abstract: PROBLEM TO BE SOLVED: To easily an effectively processed a point seeking work, in a point setting radar device used for finding a desired position. SOLUTION: This device is equipped with an irradiation means 1 to radiate measurement light waves in a prescribed direction, a light receiving means 2 to receive the measurement light waves returning in a prescribed direction, a range finding means 3 to measure the distance up to a target positioned in a prescribed direction, on the basis of the delay of the propagation of the measurement light waves from the radiation thereof by the irradiation means 1 to the receipt by the light receiving means 2, and a comparison means 4 to perform a calculation for making a comparison between the distance to the target measured by the range finding means 3 and a preset distance. Furthermore, the device is equipped with a warning means for generating an alarm, depending on the result of the comparison by the comparison means 4.
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公开(公告)号：JPH08160132A
公开(公告)日：1996-06-21
申请号：JP30628394
申请日：1994-12-09
Applicant: NIKON CORP
Inventor： IOHARA KENJIRO , KAYAMA YASUNAGA , YAMADA KAZUTO
Abstract: PURPOSE: To accurately find the probability of the existence of a target on the road where a vehicle is traveling while detecting the target in the advancing direction by providing a curvature detecting means, etc., which detects the radius of curvature of the road. CONSTITUTION: A radar position measuring means 1 finds the distance and direction to a target existing in the area covered by measuring waves by transmitting the waves in the advancing direction of a vehicle and receiving reflected waves from the target. A curvature detecting means 2 detects the radius of curvature of the road where the vehicle is traveling based on the speed of the vehicle from a car speed sensor and lateral acceleration of the vehicle from a lateral acceleration sensor. An interval detecting means 3 calculates the interval between the target found from the distance and direction to the target found by the measuring means 1 and a circular arc having the radius of curvature detected by the detecting means 2. A judging means 4 estimates that the probability of the existence of the target on the road is high by finding that the possibility of the target existing in the passing extent of the vehicle becomes higher as the interval calculated by the calculating means 3 becomes shorter. Therefore, the degree of the risk awaiting the vehicle is faithfully indicated.
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公开(公告)号：JPH07167944A
公开(公告)日：1995-07-04
申请号：JP34295593
申请日：1993-12-15
Applicant: NIKON CORP
Inventor： KAYAMA YASUNAGA
Abstract: PURPOSE:To make accurate judgement without being influenced by change in the light emission amount of a light source or the light reception sensitivity of a light receiving element by determining the ratio of the light reception signal due to a reflected light from the surface of a light transmissive plate and a diffused light from attachment to this plate to the light reception signal due to the diffused light solely from the attachment to the plate. CONSTITUTION:A light feeding lens 5 is installed ahead of a laser diode 4 as a light source, and a light receiving element 8 is provided to receive reflected pulses from an object via a light receiving lens 7. A light transmissive plate 6 is furnished between this object to be measured and the lenses 5, 7, and a light receiving elements 21 and 31 are installed, the former receiving the reflected light from the surface of the plate 6 and also the diffused light from surface attachment while the latter receiving the diffused light solely from the surface attachment. The output sides of these receiving elements 21, 31 are connected with a contamination judging part 24 via respective level sensing parts 23, 33. The judging part 24 gives a contamination signal S11 to a computer part 1 if the ratio of the received light levels of the two sensing parts 33, 23 is greater than the setting.
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Patent Agency Ranking
公开(公告)号：JPH05232227A
公开(公告)日：1993-09-07
申请号：JP7229692
申请日：1992-02-21
Applicant: HONDA MOTOR CO LTD , NIKON CORP
Inventor： KIKUCHI HAYATO , TSUCHIYA RYOICHI , SATO MASAMITSU , FUJITA YASUHIKO , KAYAMA YASUNAGA , YOSHIDA HISASHI , MIYATA MASASHI
Abstract: PURPOSE:To provide a distance measuring device capable of satisfying the request of miniaturization and wt. reduction and capable of accurately measuring a distance even at a place easy to generate noise or even under bad temp. and humidity environment. CONSTITUTION:The light source 13 composed of semiconductor laser of a main body part 1 and the light transmitting lens 21. of an optical part 2 are connected by an optical fiber 31. The light detecting lens 22 of the optical part 2 and the photodetector 14 of the main body part 1 are connected by an optical fiber 32.
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公开(公告)号：JPH10122858A
公开(公告)日：1998-05-15
申请号：JP27386096
申请日：1996-10-16
Applicant: NIKON CORP
Inventor： KAYAMA YASUNAGA
Abstract: PROBLEM TO BE SOLVED: To measure the inclination of a container accurately and inexpensively by detecting a reflection pulse signal reflected by a plurality of liquid level positions in the container and obtaining its propagation delay time difference. SOLUTION: The ultra-short pulse signal of a pulse generation means 1 is propagated in the longitudinal directions of pulse signal propagation means 3a and 3b. The propagation means 3a and 3b are made of, for example, a rod-shaped metal, the dielectric constant of a liquid for dipping a part that is lower than air where an upper part contacts is high, and they have different impedances. Therefore, impedance mismatching occurs at the position of the a liquid level 4 and a pulse signal is reflected on the liquid level 4, and a pulse signal is reflected similarly at the lower edge part, thus detecting 5a and 5b each reflection pulse signal, where the liquid level position on the propagation means 3a and 3b changes according to the inclination of a container, and delay time detection parts 6a and 6b measure the difference in each propagation time from the detected reflection pulse signals 5a and 5b. An operation part 7 obtains the inclination of the liquid level 4 for the container according to the delay time difference of both, thus eliminating the need for measuring a capacitance or the need for a light-emitting element.
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公开(公告)号：JPH07218632A
公开(公告)日：1995-08-18
申请号：JP2904894
申请日：1994-02-01
Applicant: NIKON CORP
Inventor： KAYAMA YASUNAGA
Abstract: PURPOSE:To provide a distance measuring equipment in which high speed signal processing is realized while avoiding increase in the scale of signal processing circuit by reducing the signal processing load at a light receiving means and subsequent circuit. CONSTITUTION:The light receiving range is split in same direction as the splitting direction of light transmitting range with the border of split light receiving range being shifted from that of the split light transmitting range. Light is then emitted in a predetermined order from three LD elements 1a-1c in a semiconductor laser 1 and a distance detecting section detects the distance up to an object based on the time being elapsed after emission of light from the LD elements 1a-1c before reception thereof by light receiving elements 4a-4d. A direction detecting section then detects the direction of the object based on the decision results at a transmitting light range deciding section and a receiving light range deciding section. Consequently, a measuring effect similar to that, obtained by dividing the measuring range finely using many light receiving or emitting elements, can be achieved through combination of fewer pieces of information.
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公开(公告)号：JPH07198850A
公开(公告)日：1995-08-01
申请号：JP35126093
申请日：1993-12-28
Applicant: NIKON CORP
Inventor： KAYAMA YASUNAGA
Abstract: PURPOSE:To provide a distance measuring apparatus in which load of a signal processing after light receiving means is reduced, increase in scale of a signal processor is avoided while accelerating the signal processing and the cost can be reduced. CONSTITUTION:Light emitting and receiving ranges are divided in one dimensional direction so that dividing directions are crossed, emitting lights from four LD elements 1a-1d of a semiconductor laser are sequentially emitted in a predetermined order, a distance to an object to be measured is detected by a distance detector based on the time from a time when lights are emitted from the elements 1a-1d to a time when the lights are received by photoreceiving elements 4a-4d of a photoreceiver 4, and a region of the object to be measured is detected by a region detector based on a decided result obtained by light emitting and receiving range discriminators. Accordingly, the distance to the object to be measured and the region can be detected by the same measurement as that when the plurality of the elements are arranged in a matrix state to fragment the receiving range in two dimensional manner, i.e., a combination of less information than that.
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公开(公告)号：JPH07198846A
公开(公告)日：1995-08-01
申请号：JP35125993
申请日：1993-12-28
Applicant: NIKON CORP
Inventor： TANAKA TOSHIHIRO , KAYAMA YASUNAGA
Abstract: PURPOSE:To suppress the cost and power consumption by providing gradient detecting means for checking gradient of waveform of a received signal and a predicting means for predicting peak position of the signal based on data of the detecting means. CONSTITUTION:A reflected pulse from an object 11 to be measured is condensed by a receiving lens 6, and made incident on a photoreceiver 7. The incident light is photoelectrically converted by the photoreceiver 7, a received signal S4 is amplified by an amplifier 8, and input to a comparator 9. The comparator 9 switches over threshold level to high and low stages based on a threshold switching-over signal S9 from a computer 1, and sends received trigger signals S6 at the respective threshold levels to a counter 10. The counter 10 decides gradient of waveform of the signal S4 from a set value of amplitude in an amplitude direction of the signal and a width in a time base direction of the signal to the set value. The amplitude and a peak position of the signal S4 are predicted from its gradient by the computer 1.
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