公开(公告)号：EP2055394A3

公开(公告)日：2010-06-02

申请号：EP08165941.9

申请日：2008-10-06

Applicant: NORDSON CORPORATION

Inventor： Hassler, William L. Jr. ,  Tedrow, Jon D.

IPC: B05C5/02 ,  B05C11/10

CPC classification number: B05C5/0279 ,  B05C11/1028 ,  B05C11/1034 ,  H01L2924/0002 ,  H01L2924/00

Abstract: Fluid dispensers (10,12,14) and methods for dispensing viscous fluids with improved edge definition. Pressurized fluid is periodically supplied in pulses to nozzles (80) in a nozzle plate (18) of a dispensing head as the dispensing head is moved by a multi-axis stage relative to a stationary substrate. Droplets are discharged from the nozzles (80) and impact on the substrate. The droplets coalesce together to define the coating. The discharge from one or more groups of nozzles (80) can be temporarily suspended to avoid coating a component or area on the substrate (120) while adjacent areas continue to receive droplets of the fluid.

公开(公告)号：EP2055394A2

公开(公告)日：2009-05-06

申请号：EP08165941.9

申请日：2008-10-06

Applicant: NORDSON CORPORATION

Inventor： Hassler, William L. Jr. ,  Tedrow, Jon D.

IPC: B05C5/02 ,  B05C11/10

CPC classification number: B05C5/0279 ,  B05C11/1028 ,  B05C11/1034 ,  H01L2924/0002 ,  H01L2924/00

Abstract: Fluid dispensers (10,12,14) and methods for dispensing viscous fluids with improved edge definition. Pressurized fluid is periodically supplied in pulses to nozzles (80) in a nozzle plate (18) of a dispensing head as the dispensing head is moved by a multi-axis stage relative to a stationary substrate. Droplets are discharged from the nozzles (80) and impact on the substrate. The droplets coalesce together to define the coating. The discharge from one or more groups of nozzles (80) can be temporarily suspended to avoid coating a component or area on the substrate (120) while adjacent areas continue to receive droplets of the fluid.

Abstract translation: 流体分配器（10,12,14）和用于分配具有改进的边缘清晰度的粘性流体的方法。 加压流体在脉冲周期性提供给在分配头的喷嘴板（18）的喷嘴（80）作为所述分配头通过多轴相对于静止的基片一阶段移动。 液滴从喷嘴（80）和在基片上的冲击放电。 液滴聚结在一起以限定涂层。 从喷嘴（80）的一个或多个组的放电可被暂时中止，以避免在基片上（120），而相邻区域继续接收流体的液滴涂覆的部件或区域。