公开(公告)号：US10267678B2

公开(公告)日：2019-04-23

申请号：US14577748

申请日：2014-12-19

Applicant: NUCTECH COMPANY LIMITED

Inventor： Ziran Zhao ,  Jianhong Zhang ,  Hongqiu Wang ,  Weiwei Wang ,  Zhiming Wang ,  Yumin Yi

IPC: G01N21/00 ,  G01J3/00 ,  G01J3/02 ,  G01J3/44 ,  G01N21/65 ,  G01J3/28

Abstract: Embodiments of the present invention provide a Raman spectroscopic inspection method, comprising the steps of: measuring a Raman spectrum of an object to be inspected successively to collect a plurality of Raman spectroscopic signals; superposing the plurality of Raman spectroscopic signals to form a superposition signal; filtering out a florescence interfering signal from the superposition signal; and identifying the object to be inspected on basis of the superposition signal from which the florescence interfering signal has been filtered out. By means of the above method, a desired Raman spectroscopic signal may be acquired by removing the interference caused by a florescence signal from a Raman spectroscopic inspection signal of the object. It may inspect correctly the characteristics of the Raman spectrum of the object so as to identify the object effectively.