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1.
公开(公告)号:JPS6151308A
公开(公告)日:1986-03-13
申请号:JP17248284
申请日:1984-08-21
Applicant: Nat Aerospace Lab
Inventor: MOTOE SHINJI , UEDA TOSHIO , KATO KENICHI
IPC: B28D5/02 , B28D1/22 , B28D5/00 , H01L21/304
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2.
公开(公告)号:JPS6186214A
公开(公告)日:1986-05-01
申请号:JP20930084
申请日:1984-10-05
Applicant: Nat Aerospace Lab
Inventor: MOTOE SHINJI , UEDA TOSHIO , KATO KENICHI
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