SnO2 ISFET device, manufacturing method, and methods and apparatus for use thereof

    公开(公告)号:US20040180463A1

    公开(公告)日:2004-09-16

    申请号:US10811801

    申请日:2004-03-30

    CPC classification number: G01N27/414 H01L2924/0002 H01L2924/00

    Abstract: A SnO2 ISFET device and manufacturing method thereof. The present invention prepares SnO2 as the detection membrane of an ISFET by sol-gel technology to obtain a SnO2 ISFET. The present invention also measures the current-voltage curve for different pH and temperatures by a current measuring system. The temperature parameter of the SnO2 ISFET is calculated according to the relationship between the current-voltage curve and temperature. In addition, the drift rate of the SnO2 ISFET for different pH and hysteresis width of the SnO2 ISFET for different pH loop are calculated by a constant voltage/current circuit and a voltage-time recorder to measure the gate voltage of the SnO2 ISFET.

    SnO2 ISFET device, manufacturing method, and methods and apparatus for use thereof

    公开(公告)号:US20040129984A1

    公开(公告)日:2004-07-08

    申请号:US10737836

    申请日:2003-12-18

    CPC classification number: G01N27/414 H01L2924/0002 H01L2924/00

    Abstract: A SnO2 ISFET device and manufacturing method thereof. The present invention prepares SnO2 as the detection membrane of an ISFET by sol-gel technology to obtain a SnO2 ISFET. The present invention also measures the current-voltage curve for different pH and temperatures by a current measuring system. The temperature parameter of the SnO2 ISFET is calculated according to the relationship between the current-voltage curve and temperature. In addition, the drift rate of the SnO2 ISFET for different pH and hysteresis width of the SnO2 ISFET for different pH loop are calculated by a constant voltage/current circuit and a voltage-time recorder to measure the gate voltage of the SnO2 ISFET.

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