公开(公告)号：US10663589B2

公开(公告)日：2020-05-26

申请号：US16371723

申请日：2019-04-01

Applicant: National Yunlin University of Science and Technology

Inventor： Yung-Cheng Wang ,  Lih-Horng Shyu ,  Chung-Ping Chang ,  Hung-Ta Shih ,  Pi-Cheng Tung

IPC: G01B9/02 ,  G01S17/66 ,  G01P13/00

Abstract: A laser interferometer system includes a beam splitter to split a laser beam into first and second beam sets, a first retroreflector mounted to an object to reflect the first beam set, a first detecting device for detecting movements of the object in x-, y- and z-axis directions based on the reflected first beam set, a second retroreflector mounted to the object to reflect the second beam set, and a second detecting device for detecting rotations and movements of the object with respect to the y- and z-axis directions based on the reflected second beam set. The movements of the object in the z-axis direction obtained by the first and second detecting devices are used to obtain a rotation of the object with respect to the x-axis direction.