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公开(公告)号：JPH1194754A
公开(公告)日：1999-04-09
申请号：JP25516497
申请日：1997-09-19
Applicant: OLYMPUS OPTICAL CO
Inventor： NISHIZAWA MAKOTO , MORITA AKIMASA , SATO YASUSHI
IPC: G01N21/88 , G01N21/958
Abstract: PROBLEM TO BE SOLVED: To obtain a substrate inspection apparatus by which a high-accuracy defect inspection can be performed with good efficiency by a method wherein an observation- unit support means is moved on a substrate, to be inspected, along one direction, a microscopic observation means is moved in a direction at right angles to the movement direction of the observation-unit support means on the substrate to be inspected and an observation can be performed by the microscopic observation means. SOLUTION: When the microscopic observation of a substrate to be inspected is performed, an arm 3 is moved to the upper direction by guided ball screws 4 from the state of a macroscopic observation on the surface of the substrate, to be inspected, in such a way that the front-side fulcrum receiver part 13 of a holder 2 is supported by a fulcrum part 15. When a motor 8 is turned, the guided ball screws 4 are turned simultaneously via a belt 7 and a pulley 5, and equal driving forces to the upper direction are made to act on central parts in both side edges of the holder 2. The holder 2 is turned in the counterclockwise direction around the fulcrum part 15, and it is raised to the front position of an apparatus body 1. Light from a back light 22 is irradiated, and an inspector performs a microscopic observation which inspects a defect such as a flaw or the like on the surface of the substrate, to be inspected, by using a stereomicroscope 26.
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公开(公告)号：JPH1184217A
公开(公告)日：1999-03-26
申请号：JP24549997
申请日：1997-09-10
Applicant: OLYMPUS OPTICAL CO
Inventor： OKAHIRA HIROYUKI , MORITA AKIMASA
IPC: G02B7/16
Abstract: PROBLEM TO BE SOLVED: To provide a click mechanism and a motor-driven revolver device using the mechanism capable of obtaining stable click actions. SOLUTION: While a rotating member 1 to which plural objective lenses 2 are attached is rotated by a step motor 6 through a motor gear part 5 with respect to a fixed member 4, voltage is applied on the bimorph material 81 of a click part 8 from a power source 12, so that the material 81 is deformed and a click ball 10 is positioned above a click groove 7. Only at the time of positioning the lens 2 after stopping the step motor 6, applying the voltage on the material 81 from the power source 12 is interrupted to make the click ball 10 of the click part 8 fall in the groove 7.
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公开(公告)号：JPS6236502A
公开(公告)日：1987-02-17
申请号：JP7033885
申请日：1985-04-03
Applicant: OLYMPUS OPTICAL CO
Inventor： MORITA AKIMASA , YOSHINAGA MAKOTO , KAWASAKI MASAMI , IBA YOICHI , MIYAHARA NORIYUKI , NAGANO TAKASHI
Abstract: PURPOSE:To make it possible to conduct measurement while observing a point of measurement, by providing an optical system for displacement measurement and an optical system for observation and by making coaxial the optical axes of the parts of the two optical systems including objective lenses. CONSTITUTION:A light from an illuminating system for observation comprising a lamp 35a and lenses 35b and 35c enters a beam splitter 34 and then enters a beam splitter 36 together with a laser beam. The laser beam and the illuminating light which are made to get into an optical axis of observation by the beam splitter 36 pass through a beam splitting plane 36a and a 1/4 wavelength plate 37 and enters an objective lens 38 of an a focal design system. The illuminating light is made to illuminate the whole of a visual field by the objective lens 38, while the laser beam projects a minute spot for displacement measurement onto a sample 39. The reflected light of the illuminating light from the sample goes in the reverse course and forms an image on the plane of a field stop of an eyepiece 42.
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公开(公告)号：JPS60258513A
公开(公告)日：1985-12-20
申请号：JP11514084
申请日：1984-06-05
Applicant: OLYMPUS OPTICAL CO
Inventor： MORITA AKIMASA , MIYAHARA NORIYUKI
Abstract: PURPOSE:To obtain a photometric microscope system which can be used without failures with an easy operation by combining a photometric microscope body for various purposes and individual photometric units to operate individual units in relation to one another organically. CONSTITUTION:The photometric microscope system is provided with plural kinds of illuminating means such as a transmission illuminating unit 16, a projection illuminating unit 18, etc. which projects a photometric illuminating light or an exciting light, filter 23 having the waveform selecting function, wavelength selecting means 24 such as spectroscope or the like, and photoelectric converting means such as an photoelectron multiplier 25, photo diode, photoelectric conductor, or the like, and proper kinds of means are optionally selected from individual means in accordance with a purpose and are combined with a microscope body 15, and a system controller 28 which controls these means in relation to one another organically is provided. Thus, individual means are operated in close relation to one another, and as the result, operation failures and measurement failures are prevented and the operation is very easy.
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公开(公告)号：JPS58220575A
公开(公告)日：1983-12-22
申请号：JP10432082
申请日：1982-06-17
Applicant: Olympus Optical Co Ltd
Inventor： IMAI MASAHARU , ONIZUKA OSAMU , MORITA AKIMASA , TOUFUKUJI IKUO , TANAKA SHIYUNPEI , MATSUI HIROSHI
CPC classification number: H04N5/30
Abstract: PURPOSE:To compensate a dark current spike with a simple constitution without lowering a signal reading out speed, by comparing simultaneously an electric charge of an adjacent transfer stage of a horizontal transfer register. CONSTITUTION:Electric charges of electrodes 36A and 40A displaced by one transfer stage of a horizontal transfer register 34 are detected due to the change of the source electric potential of MOS type field effect transistors MOSFET46 and 48, and the electric charge of an adjacent photoelectric transfer element 30 is detected. A dark current spike is detected by comparators 50 and 56. When an electric charge on a transfer stage receives the dark current spike, a source electric potential C1 becomes lower than a C2, and a sample/hold circuit 58 reads out the electric charge on the transfer stage but does not output a vidoe signal. If the difference of the electric potential C1 and C2 is lower than a reference voltage VR, the circuit 58 outputs a signal of a circuit 60.
Abstract translation: 目的：通过简单的结构补偿暗电流尖峰而不会降低信号读出速度，同时比较水平传输寄存器的相邻传输级的电荷。 构成：由于MOS型场效应晶体管MOSFET46和48的源极电位的变化以及相邻光电转换器的电荷，检测到由水平转移寄存器34的一个转移级位移的电极36A和40A的电荷 检测元件30。 由比较器50和56检测到暗电流尖峰。当转印台上的电荷接收到暗电流尖峰时，源极电位C1变得低于C2，并且采样/保持电路58读出电荷 传输阶段，但不输出vidoe信号。 如果电位C1和C2的差低于参考电压VR，则电路58输出电路60的信号。
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Patent Agency Ranking
公开(公告)号：JPS56158923A
公开(公告)日：1981-12-08
申请号：JP6217980
申请日：1980-05-13
Applicant: OLYMPUS OPTICAL CO
Inventor： MORITA AKIMASA
Abstract: PURPOSE:To permit measurement of quantity of fluorescence with respect to prescribed quantity of exciting light by simultaneously integrating the measured values of the quantities of exciting light and fluorescence and sampling and holding the integrated velue of the fluorescence side at the moment when the measured value of the exciting light attains a constant value. CONSTITUTION:The outputs of a fluorescence detector 21 and exciting light detector 22 are converted to DC signals in AC amplifier and rectifier circuits 23 and 24, after which they are integrated by integrators 25 and 26 respectively. The integrators 25, 26 start integration simultaneously with the start of photometry. The output of the integrator 25 is supplied to a sample holding circuit 27, and the output of the integrator 26 to a comparator 28. The comparator 28 compares this output signal and the set voltage of a reference voltage source 29, and controls the gate of the circuit 27 by the inversion signal of the point of time when the integrated value of the integrator 25 exceeds the set voltage of the voltage source 29, thereby holding the integrated value of the integrator 25 into the circuit 27. The integrated value of the integrator 25 held in the circuit 27 is converted to a digital value by an A/D converter 30, and is supplied to an external device through an interface 31.
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公开(公告)号：JPH11160242A
公开(公告)日：1999-06-18
申请号：JP26434298
申请日：1998-09-18
Applicant: OLYMPUS OPTICAL CO
Inventor： OKAHIRA HIROYUKI , NAKAMURA IKUZO , MORITA AKIMASA , FUJISAKI NOBUO
IPC: G01N21/88 , G01N21/896 , G01N21/958 , G02F1/13
Abstract: PROBLEM TO BE SOLVED: To provide a substrate-inspecting apparatus which can be compact and highly accurately efficiently inspect defects of substrates to be inspected. SOLUTION: The apparatus has a substrate-holding means 2 for holding a substrate 3 to be inspected, a driving means for raising the substrate-holding means 2 to a predetermined angle, position coordinate-detecting means 19, 20 set to the substrate-holding means in parallel to at least two directions of side edges of the substrate 3 to be inspected for detecting a position coordinate of a defect part on the substrate 3 to be inspected, an observation system- supporting means 6 supporting a micro observation system 9 and set to move over a plane of the substrate 3 to be inspected, and a control means 11 for controlling the micro observation system 9 on the basis of the position coordinate of the defect part detected by the position coordinate-detecting means 19, 20 to move to be present over the corresponding defect part on the substrate 3 to be inspected.
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公开(公告)号：JPH10253332A
公开(公告)日：1998-09-25
申请号：JP5734597
申请日：1997-03-12
Applicant: NIRECO CORP , OLYMPUS OPTICAL CO
Inventor： KAWAMICHI KENICHI , KAWASHIMA MASAYUKI , MORITA AKIMASA
Abstract: PROBLEM TO BE SOLVED: To detect white defects and black defects distinctively by obtaining a first image of a multi-value image detected by an image sensor, obtaining a second image delayed by an R cycle from the first image and a third image delayed by an S cycle from the first image, and comparing the second image with the first image, and the second image with the third image at the same time point. SOLUTION: An object 1 to be inspected moves in a direction of an arrow, having a cyclic pattern in a direction orthogonal to the movement direction. A line sensor camera 2 is disposed so that a longitudinal direction of a built-in line sensor becomes orthogonal to the movement direction of the object 1, with taking moving images of the cyclic pattern. An A/D converter 3 A/D converts a gray-scale image of a video signal from the line sensor camera 2, thereby obtaining a multi-value image A. A one cycle length delay circuit 4 delays the image A by one cycle thereby obtaining an output B. A two cycle length delay circuit 5 delays the image A by two cycles thereby obtaining an output C. A defect detection circuit receiving inputs of the image A and outputs B, C detects a defect.
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公开(公告)号：JPH09189865A
公开(公告)日：1997-07-22
申请号：JP23164896
申请日：1996-09-02
Applicant: OLYMPUS OPTICAL CO
Inventor： YOSHINAGA MAKOTO , IBA YOICHI , MIYAHARA NORIYUKI , KAWASAKI MASAMI , MORITA AKIMASA , NAGANO TAKASHI
Abstract: PROBLEM TO BE SOLVED: To make the whole of a device compact and to simplify the moving mechanism of an objective lens by making a pupil hardly vignetted and reducing the movement of an eye-point position even when an observation optical system is an afocal system. SOLUTION: An inspection stage 7 on which a wafer 10 is placed can be linearly moved in a direction shown by an arrow B set in parallel with a sample surface by a roller guide 17. The observation optical system including an objective lens 32 is constituted so as to be afocal. The lens 32 is supported so that it can be linearly moved in a direction shown by an arrow A set in parallel with the sample surface and orthogonally crossed to the direction shown by the arrow B. By linearly moving the stage 7 and the lens 32 in a direction that they are mutually orthogonally crossed, the whole surface of the wafer 10 can be observed.
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公开(公告)号：JPS62265610A
公开(公告)日：1987-11-18
申请号：JP10926686
申请日：1986-05-13
Applicant: OLYMPUS OPTICAL CO
Inventor： MIYAHARA NORIYUKI , MORITA AKIMASA , SHINOHARA DAIZO
Abstract: PURPOSE:To actively avoid the collision of a sample surface with an objective lens by detecting limit positions of vertical movement of a focusing part and driving a focusing part driving system in the reverse direction up to the disappearance of a detecting signal or a driving distance at the time of vertical movement. CONSTITUTION:At the time of normal operation, a signal from an AF detecting system 1 is converted into a servo by an AF servo system 1A and a motor 13 is controlled to execute AF operation. When a stage 14 is lifted and the objective lens 16 almost collides with a sample 15, an upper limit sensor 2 detects a sensor plate and inputs a signal to a sensor signal processing circuit 4. A processing signal is inputted to a control logic circuit 9 and the circuit 9 actuates a constant voltage generating circuit 10 so as to generate a voltage for moving down the stage 14 from the circuit 10 and turns the switching circuit 11 from the output of the servo system 1A to the output of the circuit 10. Thereby, the stage 14 is controlled so as to be descended immediately before the collision of the sample 15 with the lens 16, so that the sample can be actively prevented from collision with the lens 16.
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