公开(公告)号：WO2008017490A2

公开(公告)日：2008-02-14

申请号：PCT/EP2007007075

申请日：2007-08-09

Applicant: OPSOLUTION NANOPHOTONICS GMBH ,  OPSOLUTION GMBH ,  HILLMER HARTMUT ,  KOECHER WOLFGANG ,  KRIEG JUERGEN ,  SANDHAGEN CARL ,  HOHEISEL HARDY ,  WILLEMER WINFRIED

Inventor： HILLMER HARTMUT ,  KOECHER WOLFGANG ,  KRIEG JUERGEN ,  SANDHAGEN CARL ,  HOHEISEL HARDY ,  WILLEMER WINFRIED

IPC: G01J3/28 ,  G02B5/28 ,  G03F7/00 ,  H01L27/146

CPC classification number: G02B5/284 ,  A61B5/0075 ,  B82Y10/00 ,  B82Y40/00 ,  G01J3/02 ,  G01J3/0259 ,  G01J3/2803 ,  G01J3/36 ,  G01J3/4406 ,  G01J3/51 ,  G02B5/201 ,  G02B5/288 ,  G03F7/0002 ,  H01L27/14621 ,  H01L27/14685 ,  Y10T29/49826

Abstract: The invention relates to an optical filter and a method for its production, and to a device for the examination of the spectral and spatial distribution of an electromagnetic radiation irradiated from an object. The invention is based on the task of providing an optical filter of the above described type that is inexpensive to produce, which can be used to detect a plurality of wavelengths, in which, however, tuning of the DBR mirrors by means of displacement is not necessary. Furthermore, a method for the production of such a filter is provided. According to a first aspect of the present invention this task is solved by a method for the production of an optical filter array having two DBR mirrors, and a cavity present between the same, comprising cavity sections having a plurality of different heights, each forming one Fabry Perot filter element, characterized by the following steps: applying a first DBR mirror onto a substrate, forming of a layer comprised of a cavity material on the DBR mirror, wherein this layer is equipped with a plurality of cavity sections forming the filter elements by means of utilizing a nanoimprint method, and applying the second DBR mirror on the cavity material having a structuring that is defined by the different heights of the cavity sections.

Abstract translation: 本发明涉及一种光学滤波器及其制造方法，以及一种用于研究从物体发出的电磁辐射的光谱和空间分布的装置。 本发明的目的是提供上述类型的成本可生产的光学滤波器，其中可以检测多个波长，但是其中不需要通过移动DBR镜来进行调谐。 另外，应该提出生产这种过滤器的方法。 根据本发明，该目的是通过产生一种光学滤光器阵列具有两个DBR镜的方法来实现的第一方面和其具有多个不同的高度，这取决于一个法布里 - 珀罗滤光器元件上包括形成腔部，这些腔之间的现有， 其特征在于以下步骤：在衬底上施加第一DBR镜，形成由上DBR镜的腔的材料层组成的组中，所述过滤器元件的层是通过使用纳米压印法的成型模腔部，与所述多个提供， 以及将所述第二DBR反射镜施加到所述腔体材料，所述腔体材料具有由所述腔体部分的不同高度预先确定的结构。

公开(公告)号：DE102006039073A1

公开(公告)日：2008-02-14

申请号：DE102006039073

申请日：2006-08-09

Applicant: OPSOLUTION GMBH

Inventor： SANDHAGEN CARL ,  WILLEMER WINFRIED ,  KRIEG JUERGEN ,  KOECHER WOLFGANG

IPC: G01J1/42 ,  G01J1/04 ,  G01N21/25 ,  H01L31/0232

Abstract: Device for investigating the spectral and spatial distribution of an electromagnetic radiation emitted from an object comprises radiation-receiving elements made from miniaturized filter elements (5) permeable in the narrow spectral region. The filter elements and the sensor elements (3) assigned to them form a sensor arranged on the object. Preferred Features: The sensor and filter elements form a sensor and filter array. The spectral regions with a statistical or pseudo-statistical distribution are assigned to the filter elements.

公开(公告)号：DE102006039072A1

公开(公告)日：2008-02-21

申请号：DE102006039072

申请日：2006-08-09

Applicant: OPSOLUTION GMBH

Inventor： SANDHAGEN CARL ,  WILLEMER WINFRIED

IPC: H01L31/0216 ,  H01L31/101 ,  H01L31/18

Abstract: The component comprises a photoelectric sensor unit having a substrate (1) with multiple conductors (8) for detecting the radiation sensitive sensor elements (7a-7d). The conductor is arranged near the side (1a) of the substrate. An optical filter (2) is assigned to the sensor unit, which is arranged on the side of the substrate. The miniaturized Fabry-Perot filter elements (2a-2d) are permeable for multiple spectral regions to detect the radiations, where the substrate of the sensor unit is formed as a substrate for the filter. Independent claims are also included for the following: (1) a method for producing an opto-electronic component (2) a spectrometer, where the component is formed directly on a chip of an optical system.