公开(公告)号：US20170178946A1

公开(公告)日：2017-06-22

申请号：US15124036

申请日：2015-04-05

Applicant: ORBOTECH LTD.

Inventor： Michael Zenou ,  Zvi Kotler ,  Jonathan Ankri ,  Abraham Rotnemer ,  Oleg Ermak

IPC: H01L21/70 ,  H05K3/12

CPC classification number: H01L21/705 ,  H01L21/4867 ,  H01L23/15 ,  H05K1/097 ,  H05K3/02 ,  H05K3/105 ,  H05K2203/107 ,  H05K2203/1492

Abstract: A method for manufacturing includes coating a substrate (22) with a matrix (28) containing a material to be patterned on the substrate. A pattern is fixed in the matrix by directing a pulsed energy beam to impinge on a locus of the pattern so as to cause adhesion of the material to the substrate along the pattern without fully sintering the material in the pattern. The matrix remaining on the substrate outside the fixed pattern is removed, and after removing the matrix, the material in the pattern is sintered.