公开(公告)号：WO1996026418A1

公开(公告)日：1996-08-29

申请号：PCT/US1996001834

申请日：1996-02-09

Applicant: ORIEL INSTRUMENTS CORPORATION

Inventor： ORIEL INSTRUMENTS CORPORATION ,  KREMER, Alexander

IPC: G01J03/28

CPC classification number: G01J3/18

Abstract: An apparatus for providing an astigmatically-reduced image with spectroscopic instrument is disclosed which comprises a collimator (18) which collimates electromagnetic radiation; a cylindrical mirror (20) which receives and reflects the collimated electromagnetic radiation; a diffractor (22) having a surface (23) with a plurality of diffraction rulings inscribed thereon for diffracting electromagnetic radiation directed from the collimator (18); and a focuser (24) which collects, focuses and directs diffracted electromagnetic radiation and directs it towards an exit aperture (26). In the preferred embodiment, the cyclindrical mirror (20) comprises a concave cylindrical mirror positioned such that the cylindrical axis is substantially normal to rulings on the diffractor (22). In another preferred embodiment, the cylindrical mirror (20) is convex and is positioned such that the cylindrical axis is substantially parallel to the rulings on the diffractor (22).

Abstract translation: 公开了一种使用光谱仪提供散光减影图像的装置，其包括准直电磁辐射的准直器（18）; 接收并反射准直电磁辐射的柱面镜（20）; 具有表面（23）的衍射器（22），所述表面具有内接在其上的多个衍射线，用于衍射从所述准直器（18）引导的电磁辐射; 和聚焦器（24），其收集，聚焦并引导衍射的电磁辐射并将其引向出口孔（26）。 在优选实施例中，环形反射镜（20）包括凹入的圆柱形反射镜，其被定位成使得圆柱形轴线基本上垂直于衍射器（22）上的刻线。 在另一个优选实施例中，圆柱形反射镜（20）是凸形的并且被定位成使得圆柱形轴线基本上平行于衍射器（22）上的刻线。