公开(公告)号：US20020118084A1

公开(公告)日：2002-08-29

申请号：US09793307

申请日：2001-02-26

Applicant: OpticNet, Inc.

Inventor： Martin Lim ,  Robert Fan ,  Long Que

IPC: H01H051/22

CPC classification number: H01H1/0036 ,  G02B26/0866 ,  H01H61/0107 ,  H01H2001/0042 ,  H01H2061/006

Abstract: A latching mechanism for a MEMS actuator as, for example, a mirror in an NnullN fiber optic switch, maintains a thermally actuated mirror in its actuated position even in the event of a power interruption by a pair of clamps, which clamp against an actuator arm. Such actuator arm is thermally actuated by a bent beam type of thermal actuator. To provide for effective fabrication using the MEMS technique (microelectromechanical system), on for example, a silicon substrate where the entire moveable structure is a suspended mechanism, the clamps are fabricated in a normally closed position. In this position they typically interfere with the line of motion of an enlarged portion of an actuator arm being directly in the line of motion or with a post and slot technique.

Abstract translation: 用于MEMS致动器的闩锁机构，例如NxN光纤开关中的反射镜，即使在通过一对夹持器的电力中断的情况下，也将热致动反射镜保持在其致动位置，夹钳紧贴致动器臂 。 这种致动器臂由弯曲梁式的热致动器热致动。 为了提供使用MEMS技术（微机电系统）的有效制造，例如，整个可移动结构是悬挂机构的硅衬底，夹具被制造在常闭位置。 在这个位置上，它们通常干扰直接位于运动线中的致动器臂的放大部分的运动线，或者通过柱和槽技术。