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公开(公告)号：US20220155574A1
公开(公告)日：2022-05-19
申请号：US17441279
申请日：2020-07-09
Applicant: Orbotech Ltd.
Inventor： David Fisch , Avraham Adler , Ilia Lutsker , Yigal Katzir , Avinoam Rosenberg
Abstract: Provided is an optical apparatus that includes an illumination assembly which include an extended radiation source emitting radiation with a controllable spatial distribution and telecentric condensing optics, configured to receive and project the emitted radiation with a numerical aperture exceeding 0.3 along a first optical axis onto a field and an imaging assembly that includes a sensor and objective optics configured to image the field along a second optical axis onto the sensor and also a prism combiner positioned between the field and the condensing and objective optics which is configured to combine the first and second optical axes, while reflecting at least one of the optical axes multiple times within the prism combiner.
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公开(公告)号：US20240241358A1
公开(公告)日：2024-07-18
申请号：US18622193
申请日：2024-03-29
Applicant: Orbotech Ltd.
Inventor： David Fisch , Avraham Adler , Ilia Lutsker , Yigal Katzir , Avinoam Rosenberg
CPC classification number: G02B19/0066 , G02B3/08 , G02B21/361 , G02B26/0833 , G02F1/29
Abstract: Provided is an optical apparatus that includes an illumination assembly which include an extended radiation source emitting radiation with a controllable spatial distribution and telecentric condensing optics, configured to receive and project the emitted radiation with a numerical aperture exceeding 0.3 along a first optical axis onto a field and an imaging assembly that includes a sensor and objective optics configured to image the field along a second optical axis onto the sensor and also a prism combiner positioned between the field and the condensing and objective optics which is configured to combine the first and second optical axes, while reflecting at least one of the optical axes multiple times within the prism combiner.
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公开(公告)号：US11977211B2
公开(公告)日：2024-05-07
申请号：US17441279
申请日：2020-07-09
Applicant: Orbotech Ltd.
Inventor： David Fisch , Avraham Adler , Ilia Lutsker , Yigal Katzir , Avinoam Rosenberg
CPC classification number: G02B19/0066 , G02B3/08 , G02B21/361 , G02B26/0833 , G02F1/29
Abstract: Provided is an optical apparatus that includes an illumination assembly which include an extended radiation source emitting radiation with a controllable spatial distribution and telecentric condensing optics, configured to receive and project the emitted radiation with a numerical aperture exceeding 0.3 along a first optical axis onto a field and an imaging assembly that includes a sensor and objective optics configured to image the field along a second optical axis onto the sensor and also a prism combiner positioned between the field and the condensing and objective optics which is configured to combine the first and second optical axes, while reflecting at least one of the optical axes multiple times within the prism combiner.
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公开(公告)号：US10455137B2
公开(公告)日：2019-10-22
申请号：US14444607
申请日：2014-07-28
Applicant: Orbotech Ltd.
Inventor： Ofer Saphier , Doron Malka , David Fisch
Abstract: A distance measuring system is provided for auto focusing a camera of an inspection system for inspecting a planar surface that is patterned. The system includes a pattern generator, an image sensor, an optical element(s) and a processor. The pattern generator projects a spatially random pattern toward the planar surface at an oblique angle. The optical element(s) forms the image of the reflected pattern on the image sensor and the image sensor captures an image of the spatially random pattern reflected off the planar surface. The processor processes the image of the spatially random pattern and provides auto-focus information.
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