公开(公告)号：US12276897B2

公开(公告)日：2025-04-15

申请号：US17903734

申请日：2022-09-06

Applicant: Orbotech Ltd.

Inventor： Itay Peled ,  John Linden

IPC: G01J1/42 ,  G02F1/33

Abstract: An optical scanner may include a sampler to receive an optical beam and provide a sampled beam including a portion of the optical beam, a dispersive element to spectrally disperse the sampled beam along a dispersion direction, one or more detectors to receive at least a portion of the sampled beam dispersed along the dispersion direction, one or more acousto-optic deflectors (AODs) configured to deflect the optical beam from the sampler, and a controller. The controller may determine a center of mass of the sampled beam dispersed along the dispersion direction based on signals from at least one of the one or more detectors, and generate a drive signal for at least one of the one or more AODs to deflect the optical beam from the sampler along a selected deflection angle based on the center of mass.

公开(公告)号：US20240094595A1

公开(公告)日：2024-03-21

申请号：US17903734

申请日：2022-09-06

Applicant: Orbotech Ltd.

Inventor： Itay Peled ,  John Linden

IPC: G02F1/33 ,  G01J1/42

CPC classification number: G02F1/33 ,  G01J1/4257 ,  G02F2203/05

Abstract: An optical scanner may include a sampler to receive an optical beam and provide a sampled beam including a portion of the optical beam, a dispersive element to spectrally disperse the sampled beam along a dispersion direction, one or more detectors to receive at least a portion of the sampled beam dispersed along the dispersion direction, one or more acousto-optic deflectors (AODs) configured to deflect the optical beam from the sampler, and a controller. The controller may determine a center of mass of the sampled beam dispersed along the dispersion direction based on signals from at least one of the one or more detectors, and generate a drive signal for at least one of the one or more AODs to deflect the optical beam from the sampler along a selected deflection angle based on the center of mass.