公开(公告)号：US20250116632A1

公开(公告)日：2025-04-10

申请号：US18679610

申请日：2024-05-31

Applicant: Orbotech Ltd.

Inventor： Yuri Paskover ,  Tal Goichman ,  Mor Azarya ,  Itay Peled

IPC: G01N29/04 ,  G01N29/07 ,  G01N29/265 ,  H01L21/66

Abstract: A method of ultrasonic detection of voids and cracks in substrates includes controlling an ultrasonic transducer to generate an acoustic signal applied to the substrate, receiving a reflected acoustic signal detected by an ultrasonic detector, and determining a defect in the substrate based on phase and intensity of the reflected acoustic signal compared to the acoustic signal applied to the substrate.