Abstract:
An adsorption pump includes a housing, a movable part, and an adsorption part. The housing has inlet and outlet ports for a sample. The movable part is at least partly located inside the housing. The adsorption part is located inside the housing.
Abstract:
A chemical substance concentrator includes a tubular body, and a plurality of adsorption parts provided with predetermined intervals on a surface of the tubular body facing an inside of the tubular body. The chemical substance concentrator can cause a sample to easily pass through the chemical substance concentrator.
Abstract:
PROBLEM TO BE SOLVED: To miniaturize a solid electrolytic capacitor used for various kinds of electronic equipment, and to increase its capacity. SOLUTION: The solid electrolytic capacitor has: an element 10 formed by winding an anode foil 1 and a cathode foil 2 while a separator 3 is interposed between them; and a solid electrolyte 4 provided between the anode foil 1 and cathode coil 2 of the element 10 and is made of a conductive polymer. The solid electrolytic capacitor has a configuration where the anode foil 1 comprises a base material made of valve action metal foil and the vapor-deposited layer of the valve action metal formed on the surface of the base material by vapor deposition. In the vapor-deposited layer, a mode of a void diameter is 0.02-0.10 μm, and the thickness (both surfaces) of the vapor-deposited layer is 20-80 μm, thus miniaturizing the solid electrolytic capacitor by thinning and increasing its capacity. COPYRIGHT: (C)2009,JPO&INPIT
Abstract:
PROBLEM TO BE SOLVED: To enhance the characteristics and reliability of an element using a piezoelectric substance.SOLUTION: A space where a pair of targets are facing each other is provided in a vacuum chamber, a substrate and a lead supply source are installed substantially perpendicularly to the facing direction of the targets, and then a magnetic field is generated along the facing direction and a voltage is applied to the target so that plasma is generated thus forming a piezoelectric film on the substrate. When the piezoelectric film is formed, lead vapor is supplied from the lead supply source to the space where the targets are facing each other, and the pressure in the vacuum chamber is set equal to or lower than 0.13 Pa. With such arrangement, ferroelectric characteristics, piezoelectric characteristics, pyroelectric characteristics and reliability are enhanced.
Abstract:
PROBLEM TO BE SOLVED: To miniaturize a solid electrolytic capacitor used for various kinds of electronic equipment, and to increase its capacity. SOLUTION: In the electrolytic capacitor, an element 1, where anode foil 2 and cathode foil 3 are wound by interposing a separator 4 between them, is stored in a metal case 8 with an electrolyte 7 for drive, and the opening of the metal case 8 is sealed by a sealing element 9. The anode foil 2 and/or the cathode foil 3 comprise: a base material made of valve action metal foil; and a vapor-deposited layer of valve action metal formed by vapor deposition on the surface of the base material. The vapor-deposited layer of the valve action metal is formed in a frost pillar shape from the base material toward a surface layer and in a so-called aquatic plant shape, where each particle is branched into a plurality of parts which are combined integrally. Therefore, the surface area is increased by additional surface-roughening and its mechanical strength is increased, thus miniaturizing the solid electrolytic capacitor by thinning and increasing its capacity. COPYRIGHT: (C)2009,JPO&INPIT
Abstract:
PROBLEM TO BE SOLVED: To reduce crystal defects in compound films. SOLUTION: Disclosed is a thin film forming device for successively depositing compound films by a plurality of thin film forming systems. The thin film forming device comprises: two first targets 4A, 4B opposite to each other; a high density radial source 5 facing an opposed space 10 between the first targets 4A, 4B from a direction almost vertical to the confronted direction of the first targets 4A, 4B; and a base material holder 6 facing the opposed space 10 between the first targets 4A, 4B from a direction different from the high density radical source 5. The back faces of the respective first targets 4A, 4B are provided with magnets 7 generating magnetic fields in the opposed direction of the first targets 4A, 4B, and, in the first thin film forming system, a negative voltage or an AC voltage is applied to each first target so as to form a compound film on a base material 8 to be installed in the base material holder 6. In this way, an initial layer can be formed by the first thin film forming system, and crystal defects in the compound film can be reduced. COPYRIGHT: (C)2010,JPO&INPIT
Abstract:
PROBLEM TO BE SOLVED: To form a compound film having few crystal defects. SOLUTION: In order to achieve the object, this apparatus for forming a thin film comprises: two targets 9 which face to each other; a high-density radical source 11 that faces to a space 16 in which the targets 9 oppose to each other, from a direction which is almost vertical to the direction of the opposing targets 9; a substrate holder 13 which faces to the space 16 in which the targets 9 oppose to each other, from a different direction from that of the high-density radical source 11; and magnets 17 which are placed on the back face of each target 9 respectively and generate a magnetic field in an facing direction of the targets 9. A negative voltage is also applied to each target 9 to make the compound film formed on a substrate 15 which is arranged on the substrate holder 13. Thereby, the apparatus inhibits negative ions from colliding to the compound film and consequently can form the compound film having few crystal defects. COPYRIGHT: (C)2009,JPO&INPIT
Abstract:
PROBLEM TO BE SOLVED: To miniaturize a solid electrolytic capacitor used for various kinds of electronic equipment, and to increase its capacity. SOLUTION: The solid electrolytic capacitor has an element 1 formed by providing an anode electrode section 3 and a cathode electrode section 4 on electrode foil. The electrode foil comprises: a base material made of valve action metal foil; and the vapor-deposited layer of the valve action metal formed on the surface of the base material by vapor deposition. In the vapor-deposited layer, a mode of a void diameter is 0.02-0.10 μm, and the thickness (both surfaces) of the vapor-deposited layer is 20-80 μm, thus miniaturizing the solid electrolytic capacitor by thinning and increasing its capacity. COPYRIGHT: (C)2009,JPO&INPIT
Abstract:
PROBLEM TO BE SOLVED: To provide a compact piezo electric device and a piezo electric element, having increased detection signal and reduced noise.SOLUTION: The piezo electric element includes: a substrate 11 having Si as a main component; and a piezoelectric film 13 sandwiched between two electrode films formed on the substrate 11, wherein an absolute value of a piezoelectric output constant gof the piezoelectric film 13 is 10[10Vm/N] or more, and dielectric constant εis 600 or less.
Abstract:
PROBLEM TO BE SOLVED: To reduce the size of a variable capacitive element using a ferroelectric substance that can attain expansion of a variable region of electrostatic capacity, while at the same time, maintaining a high Q-value.SOLUTION: The variable capacitive element using a ferroelectric substance is provided with a ferroelectric layer 21, connected between first and second electrodes 22, 24; the ferroelectric layer 21 has a Perovskite structure that is phase-transformed from cubic crystal to tetragonal phase by compression stress Y that the ferroelectric layer has inside; and by using the ferroelectric layer, the variable capacitive element can be reduced in size.