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    MOVING STRUCTURE AND LIGHT SCANNING MIRROR USING THE SAME
    1.
    发明专利
    MOVING STRUCTURE AND LIGHT SCANNING MIRROR USING THE SAME 未知

    公开(公告)号：SG189737A1

    公开(公告)日：2013-05-31

    申请号：SG2013024781

    申请日：2009-06-25

    Applicant: PANASONIC CORP

    Inventor： TACHIBANA HIROAKI ,  NOGE HIROSHI ,  KAWANO KIYOHIKO ,  UEDA HIDEKI

    Abstract: MOVING STRUCTURE AND LIGHT SCANNING MIRROR USING THE SAMEAbstractAn impact resistance is enhanced by preventing hinges from being damaged even if an impact is provided from the outside thereto in a semiconductor machine structure. An optical scanning mirror (1) comprises a movable plate (2), the pair of hinges (3) which have one ends connected to both sides of the movable plate (2), respectively, and which form one swing axis of the movable plate (2), a fixed frame (4) so disposed as to surround the movable plate (2) and supporting the other ends of the hinges (3), and stopper parts (6) formed on the fixed frame (4). When the movable plate (2) is displaced sideways, the stopper parts (6) are brought into contact with the side edges of the recesses (2e) of the movable plate (2), and the displacement of the movable plate (2) sideways is restricted. Consequently, the hinges (3) are prevented from being damaged in an impact. Fig 1

    ACCELERATION SENSOR
    2.
    发明公开
    ACCELERATION SENSOR 有权
    ACCELEROMETER

    公开(公告)号：EP2352037A4

    公开(公告)日：2012-06-06

    申请号：EP09829025

    申请日：2009-11-19

    Applicant: PANASONIC CORP

    Inventor： YOSHIDA HITOSHI ,  SUZUKI YUJI ,  IBARA NOBUYUKI ,  UEDA HIDEKI ,  OKADA TAKESHI

    IPC: G01P15/125 ,  G01P15/18 ,  H01L29/84

    CPC classification number: G01P15/125 ,  G01P15/0802 ,  G01P15/18 ,  G01P2015/0831

    Abstract: An acceleration sensor includes: a rectangular moving electrode (4, 5); a pair of beams (6a, 6b, 7a, 7b) which connect to centers of two opposite sides of the moving electrode (4, 5), and support the moving electrode (4, 5) freely swingably; and first and second fixed electrodes (20a, 20b, 21 a, 21 b) which are provided on one side and other side of a boundary line, respectively, and are arranged to be opposed to a front surface of the moving electrode (4, 5) at a predetermined interval. A straight line that connects the pair of beams to each other is taken as the boundary line. Then, on a back surface of the moving electrode (4, 5), first and second recessed portions (11a, 11b, 11c, 11d, 13a, 13b, 13c, 13d, 12, 14) are formed on one side of the boundary line and the other side thereof, respectively.

    SEMICONDUCTOR MECHANICAL STRUCTURE
    4.
    发明专利
    SEMICONDUCTOR MECHANICAL STRUCTURE 未知

    公开(公告)号：SG189738A1

    公开(公告)日：2013-05-31

    申请号：SG2013024815

    申请日：2009-06-25

    Applicant: PANASONIC CORP

    Inventor： TACHIBANA HIROAKI ,  NOGE HIROSHI ,  KAWANO KIYOHIKO ,  UEDA HIDEKI

    Abstract: SEMICONDUCTOR MECHANICAL STRUCTURE AbstractAn impact resistance is enhanced by preventing hinges from being damaged even if an impact is provided from the outside thereto in a semiconductor machine structure. An optical scanning mirror (1) comprises a movable plate (2), the pair of hinges (3) which have one ends connected to both sides of the movable plate (2), respectively, and which form one swing axis of the movable plate (2), a fixed frame (4) so disposed as to surround the movable plate (2) and supporting the other ends of the hinges (3), and stopper parts (6) formed on the fixed frame (4). When the movable plate (2) is displaced sideways, the stopper parts (6) are brought into contact with the side edges of the recesses (2e) of the movable plate (2), and the displacement of the movable plate (2) sideways is restricted. Consequently, the hinges (3) are prevented from being damaged in an impact.Fig 1

    ACCELERATION SENSOR
    6.
    发明公开
    ACCELERATION SENSOR 审中-公开
    ACCELEROMETER

    公开(公告)号：EP2506018A4

    公开(公告)日：2013-06-19

    申请号：EP10832714

    申请日：2010-11-23

    Applicant: PANASONIC CORP

    Inventor： YOSIDA HITOSHI ,  IBARA NOBUYUKI ,  UEDA HIDEKI ,  OKADA TAKESHI ,  MORI TAKESHI ,  NOMURA MASATOSI ,  KAKIMOTO KATUMI ,  SUZUKI YUJI

    IPC: G01P15/125 ,  G01P15/08 ,  G01P15/18 ,  H01L29/84

    CPC classification number: G01P15/125 ,  G01P15/0802 ,  G01P15/18 ,  G01P2015/0831

    Abstract: An acceleration sensor includes a weight portion having a recess section and a solid section, beam portions, a movable electrode provided on the opposite surface of the weight portion from an open surface of the recess section to extend over the recess section and the solid section, a first fixed electrode arranged at the opposite side of the movable electrode from the recess section, and a second fixed electrode arranged at the opposite side of the movable electrode from the solid section. The acceleration sensor detects acceleration using a change in capacitance between the movable electrode and the fixed electrodes caused by rotation of the weight portion. The beam portions are shifted toward the recess section such that an angle between a perpendicular line extending from a gravity center position of the weight portion to the rotation axis and a surface of the movable electrode becomes equal to 45 degrees.

    Physical quantity sensor
    9.
    发明专利
    Physical quantity sensor 审中-公开
    物理量传感器

    公开(公告)号：JP2014153136A

    公开(公告)日：2014-08-25

    申请号：JP2013021953

    申请日：2013-02-07

    Applicant: Panasonic Corp ,  パナソニック株式会社

    Inventor： MORI TAKASHI ,  IBARA NOBUYUKI ,  UEDA HIDEKI

    IPC: G01L1/08 ,  G01C19/56 ,  G01L7/14 ,  G01P15/13

    Abstract: PROBLEM TO BE SOLVED: To provide a physical quantity sensor capable of bringing a frequency band which can be measured by the physical quantity sensor close to the resonance frequency of a structure.SOLUTION: A physical quantity sensor includes: a sensor portion 1, a signal processing portion 2; a selection circuit 21 for performing predetermined signal processing on physical quantity measured by the sensor portion 1; a signal conversion circuit 22; a digital signal correction circuit 23; and a Fourier conversion circuit 25 for converting changes in the physical quantity into frequency components. A servo control circuit 26 applies servo voltage on a servo voltage applying electrode to suppress the action of the sensor portion 1, when the frequency components converted by the Fourier conversion circuit 25 includes frequencies neat the resonance frequency of the sensor 1.

    Abstract translation: 要解决的问题：提供能够使物理量传感器能够测量的频带接近结构的共振频率的物理量传感器。解决方案：物理量传感器包括：传感器部分1，信号 处理部2; 选择电路21，用于对由传感器部分1测量的物理量执行预定的信号处理; 信号转换电路22; 数字信号校正电路23; 以及用于将物理量的变化转换为频率分量的傅里叶变换电路25。 当由傅里叶变换电路25转换的频率分量包括传感器1的谐振频率的频率时，伺服控制电路26对伺服电压施加电极施加伺服电压以抑制传感器部分1的动作。

    Acceleration sensor
    10.
    发明专利
    Acceleration sensor 有权
    加速传感器

    公开(公告)号：JP2014077742A

    公开(公告)日：2014-05-01

    申请号：JP2012226509

    申请日：2012-10-12

    Applicant: Panasonic Corp ,  パナソニック株式会社

    Inventor： KISHIMOTO SHINICHI ,  UEDA HIDEKI ,  TAURA TAKUMI ,  YOSHIDA HITOSHI ,  MORI TAKASHI ,  IBARA NOBUYUKI ,  EDA KAZUO

    IPC: G01P15/18 ,  G01P15/125 ,  H01L29/84

    Abstract: PROBLEM TO BE SOLVED: To provide an acceleration sensor capable of increasing the detection sensitivity of acceleration in three directions perpendicular to each other.SOLUTION: The acceleration sensor includes; an X-detection section 10 that detects an acceleration in an X-direction by oscillating a first movable electrode 11 using a pair of beam sections 12a and 12b as axes; a Y-detection section 20 that detects an acceleration in a Y-direction by oscillating a second movable electrode 21 using a pair of beam sections 22a and 22b as axes; and a Z-detection section 30 that detects an acceleration in a Z-direction by allowing a third movable electrode 31, which is held by two pairs of beam sections 32a and 32b, 32c and 32d, to make a parallel movement in a vertical direction, which are disposed in one chip.

    Abstract translation: 要解决的问题：提供能够提高彼此垂直的三个方向上的加速度的检测灵敏度的加速度传感器。解决方案：加速度传感器包括： X检测部10，其通过使用一对梁部12a和12b作为轴振荡第一可动电极11来检测X方向的加速度; Y检测部20，其通过使用一对光束部22a和22b振动第二可动电极21作为轴来检测Y方向的加速度; 以及Z检测部30，其通过使由两对光束部32a，32b，32c，32d保持的第三可动电极31沿垂直方向平行移动来检测Z方向的加速度 ，其设置在一个芯片中。

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