公开(公告)号：WO1997034124A1

公开(公告)日：1997-09-18

申请号：PCT/US1997003814

申请日：1997-03-12

Applicant: PHASE METRICS, INC.

Inventor： PHASE METRICS, INC. ,  BREZOCZKY, Blasius ,  POGREBINSKY, Vladimir

IPC: G01C09/02

CPC classification number: G01N21/88

Abstract: An automatic surface inspection apparatus (10) comprises a light source (12) that provides a coherent light beam (20) that is split (14) and then recombined in a prism (21) to generate an interference pattern. A cylindrical lens (26) projects the interference pattern onto the surface of a disk (30) as a line of light (50). A linear detection array (45) converts the reflected line of light into an electrical signal that has a magnitude which varies dependent upon the reflected light intensity. Defects present on the surface of the disk cause variations in the reflected light intensity manifested as differences in the electrical signal output by the detection array (45).

Abstract translation: 自动表面检查装置（10）包括提供相干光束（20）的光源（12），所述相干光束（20）被分离（14），然后在棱镜（21）中重新组合以产生干涉图案。 柱面透镜（26）将干涉图案作为光线（50）突出到盘（30）的表面上。 线性检测阵列（45）将反射的光线转换成具有取决于反射光强度而变化的幅度的电信号。 存在于盘的表面上的缺陷导致反射光强度的变化，表现为由检测阵列（45）输出的电信号的差异。