公开(公告)号：DE60315286T2

公开(公告)日：2008-02-14

申请号：DE60315286

申请日：2003-04-29

Applicant: PHILIPS INTELLECTUAL PROPERTY

Inventor： KLEE MAREIKE ,  BRAND HANS-WOLFGANG ,  KRAFCZYK EGON ,  LOEBL HANS-PETER ,  BACHMANN PETER

IPC: B06B1/06 ,  H01L27/20

Abstract: The invention relates to an array of ultrasound transducers which each comprise a membrane that is comprised of diamond or diamond-like carbon, a barrier structure, a piezoelectric layer, a first electrode and a second electrode. The barrier structure ensures strong adhesion of the piezoelectric layer to the barrier structure and thus to the device and that the piezoelectric layer only comprises a single phase. In addition, the barrier structure protects the membrane against oxidation/decomposition during the manufacturing process of piezoelectric layer. The invention further relates to an ultrasound transducer.

公开(公告)号：DE60315286D1

公开(公告)日：2007-09-13

申请号：DE60315286

申请日：2003-04-29

Applicant: PHILIPS INTELLECTUAL PROPERTY

Inventor： KLEE MAREIKE ,  BRAND HANS-WOLFGANG ,  KRAFCZYK EGON ,  LOEBL HANS-PETER ,  BACHMANN PETER

IPC: B06B1/06 ,  H01L27/20

Abstract: The invention relates to an array of ultrasound transducers which each comprise a membrane that is comprised of diamond or diamond-like carbon, a barrier structure, a piezoelectric layer, a first electrode and a second electrode. The barrier structure ensures strong adhesion of the piezoelectric layer to the barrier structure and thus to the device and that the piezoelectric layer only comprises a single phase. In addition, the barrier structure protects the membrane against oxidation/decomposition during the manufacturing process of piezoelectric layer. The invention further relates to an ultrasound transducer.