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公开(公告)号：DE50107968D1
公开(公告)日：2005-12-15
申请号：DE50107968
申请日：2001-08-15
Applicant: PHILIPS INTELLECTUAL PROPERTY
Inventor： FARKAS GEORG , GAPPISCH STEFFEN
IPC: G01R31/28 , G01R31/3181 , G01R31/3183 , G01R31/3185 , G01R31/319 , H01L21/822 , H01L27/04 , G01R31/3187
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