Abstract:
High temperature-resistant transparent coatings based on zirconium oxide, which have improved dispersion properties and a high refractive index, comprise zirconium oxide with at least one additive from the group consisting of tantalum and/or tantalum oxide, whereby the proportion of Ta atoms, in relation to the total number of metal atoms in the coating is in the range of 5 to 30%.
Abstract:
High temperature-resistant transparent coatings based on zirconium oxide, which have improved dispersion properties and a high refractive index, comprise zirconium oxide with at least one additive from the group consisting of tantalum and/or tantalum oxide, whereby the proportion of Ta atoms, in relation to the total number of metal atoms in the coating is in the range of 5 to 30%.
Abstract:
The electric lamp comprises a light-transmitting lamp vessel (1) in which a light source (2, 3) is arranged. The electric lamp comprises a light-absorbing layer (12), characterized in that the light-absorbing layer comprises sub-stoichiometric silicon oxide SiO x as a light-absorbing material, wherein 0.1 = x =1.8. The electric lamp emits yellow, amber, or red light in operation. The electric lamp may additionally comprise an optical interference filter. Preferably, the light-absorbing layer and the optical interference filter are provided by chemical or physical vapor deposition, particularly by magnetron sputtering.
Abstract:
The invention relates to a device (10) for sputtering at least one selected materialonto a substrate (5) and bringing about a reaction of this material, comprising a vacuum chamber (11), in which a substrate holder (12) is arranged, at least one magnetron sputtering mechanism (15), which is arranged in a workstation close to the substrate holder (12) and which has a target of the selected material which is suitable for producing a first plasma for sputtering at least one material onto the substrate (5), as well as a secondary plasma mechanism (16) for producing a secondary plasma, which is arranged in the workstation close to the magnetron sputtering mechanism (15) and close to the substrate holder (12), the sputtering mechanism (15) and the secondary plasma mechanism (16) forming a sputtering zone and an activation zone. At least two electromagnets (1, 3) and/or radiallymagnetized toric magnets as well as at least one magnetic multipole (2), which is formed from a plurality of permanent magnets, are arranged to produce magnetic fields to include the secondary plasma. The invention also relates to a method for coating a substrate, in which firstly materialis deposited on a substrate by means of a sputtering process and the deposited materialthen reacts in a plasma, which contains the necessary reactive species, to form a compound, wherein the plasma density and the degree of ionization of the plasma are increased with the aid of magnetic fields, which are produced by at least two electromagnets (1, 3) and/or radially magnetized toric magnets as well as at least one magnetic multipole (2), which is formed from a plurality of permanent magnets.
Abstract:
Transparent, temperature-stable coatings based on titanium oxide with a high refractive index and improved thermal and mechanical properties comprise titanium oxide with at least one additive from the group comprising aluminum and/or aluminum oxide, whereby the proportion of A1 atoms in the coating, with reference to the total number of metal atoms in the coating is in the range from 2 to 4%.