FLAT DISPLAY SCREEN AND ITS MANUFACTURING PROCESS

    公开(公告)号:JPH1055770A

    公开(公告)日:1998-02-24

    申请号:JP10012797

    申请日:1997-04-17

    Applicant: PIXTECH SA

    Abstract: PROBLEM TO BE SOLVED: To make discharge force of a microchip substantially constant by permitting an anode and a cathode insulated by a vacuum space to contain a gradual progressive hydrogen discharge source containing a film of hydrogenation material. SOLUTION: A hydrogen source is integrated with an insulation band 8, and this insulation band 8 insulates an anode 5 and an fluorescent band. In this case, activation of the hydrogen source is substantially performed by an electron bombard. An evaporation parameter of a selected one layer is adjusted so that hydrogen is taken by a material of this type. Evaporation of some layers employed for manufacturing of screen is generally performed by plasma strengthening chemical evaporation. Such an evaporation mode employs a mixture of a precursor compound of material to be evaporated. Adjustment of hydrogen contents to be added to the precursor is easy. The anode and cathode isolated by a vacuum space contains a gradual progressive hydrogen discharge source including hydrogenation material, and discharge force of the microchip can be adjusted constantly.

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