公开(公告)号：ZA200802221B

公开(公告)日：2009-01-28

申请号：ZA200802221

申请日：2008-03-10

Applicant: PLANSEE SE

Inventor： PETER ABENTHUNG ,  KARL HUBER ,  LACKNER HARALD ,  GERHARD LEICHTFREID ,  PETER POLCIK ,  CHRISTIAN WERATSCHNIG

IPC: C23C20090101

Abstract: A tubular target formed of molybdenum or a molybdenum alloy has an oxygen content of less than 50 μg/g, a density of greater than 99% of the theoretical density, and an average grain size of less than 100 μm. The molybdenum or molybdenum alloy tube may be produced by extrusion. In one embodiment, the molybdenum tube has a backing tube of titanium or titanium alloy. In an embodiment, the molybdenum tube has a varying wall thickness with an increase towards its ends.